Interfacial Delamination of PZT Thin Films

  • Fulin Shang
  • Yabin Yan
  • Takayuki Kitamura
Conference paper
Part of the IUTAM Bookseries book series (IUTAMBOOK, volume 24)


The interface strength of Pb(Zr,Ti)O3(PZT) thin films on a silicon substrate is studied experimentally and numerically in this work. First, a sandwiched cantilever specimen is proposed to perform the delamination tests. The experimental results show that the multilayered Cr/PZT/PLT/Pt/Ti thin films deposited on single-crystal silicon substrates are delaminated along the interface between Cr and PZT layers in a brittle manner. Second, based on cohesive zone models (CZMs), numerical simulations are carried out to extract the fracture toughness of the interface Cr/PZT. Three types, exponential, bilinear and trapezoidal, of CZMs are adopted. Characteristic CZM parameters are obtained through comparisons with experimental results. The simulation results indicate that (i) cohesive strength and work of separation are the dominating parameters in the CZMs; (ii) the bilinear CZM is more suitable in describing this brittle interfacial delamination; and (iii) compared with typical film/coating materials of several millimetre thicknesses, the fracture energy of this weak interface Cr/PZT is quite low. Our study demonstrates a methodology of how to measure and determine the interface bonding strength parameter of PZT thin films, which will be useful for assessing the structural integrity and reliability of PZT devices.


Cohesive Strength Cohesive Zone Model Weak Interface Multilayered Thin Film Delamination Crack 
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  1. 1.
    Shang F, Kitamura T, Hirakata H, etal (2005) Experimental and theoretical investigations of delamination at free edge of interface between piezoelectric thin films on a substrate. Int J Solids Struct 42:1729–1741zbMATHCrossRefGoogle Scholar
  2. 2.
    Akisanya AR, Meng CS (2003) Initiation of fracture at the interface corner of bi-material joints. J Mech Phys Solids 51:27–46zbMATHCrossRefGoogle Scholar
  3. 3.
    Reedy ED, Guess TR (1993) Comparison of butt tensile strength data with interface corner stress intensity factor prediction. Int J Solids Struct 30:2929–2936CrossRefGoogle Scholar
  4. 4.
    Freund LB, Suresh S (2003) Thin film materials. Cambridge University Press, CambridgeGoogle Scholar
  5. 5.
    Yan Y, Shang F (2009) Cohesive zone modeling of interfacial delamination in PZT thin films. Int J Solids Struct 46:2739–2749CrossRefGoogle Scholar
  6. 6.
    Volinsky AA, Moody NR, Gerberich WW (2002) Interfacial toughness measurements for thin films on substrates. Acta Materialia 50:441–466CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media B.V. 2011

Authors and Affiliations

  1. 1.Department of Engineering MechanicsXi’an Jiaotong UniversityXi’anChina
  2. 2.Department of Mechanical Engineering and ScienceKyoto UniversityKyotoJapan

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