Modeling and Simulation of Contact-Type Electrostatic Microactuator

  • Vytautas Ostasevicius
  • Rolanas Dauksevicius
Part of the Intelligent Systems, Control and Automation: Science and Engineering book series (ISCA, volume 44)


This chapter presents 3-D FE modeling and simulation of dynamics of microcantilever operating in ambient air near fixed surface. The phenomenon of squeeze-film damping is further analyzed numerically. Frequency response and transient analyses are carried out in order to determine influence of squeeze-film damping on free and forced vibrations of the microcantilever under different ambient air and vibration excitation conditions. Subsequently numerical analysis of the 3-D microcantilever under the effect of electrostatic field is provided. Static and dynamic simulations are performed in order to study important operational characteristics. Finally, the chapter is concluded with FE modeling of the microcantilever with incorporated adhesive-repulsive contact model, which uses a “classical” linear elastic link element combined with the van der Waals force-based term that accounts for the influence of dominant intermolecular interactions in the contact zone. This model is then used in conjunction with squeeze-film damping formulation in order to predict behavior of contact bouncing under different air damping and contact conditions.


Reynolds Equation Frequency Response Analysis Squeeze Number COMSOL Model Actuation Voltage Versus 
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© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  1. 1.Institute for Hi-Tech DevelopmentKaunas University of TechnologyKaunasLithuania

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