Abstract
A fabrication process of stainless steel micro components from metallic powder is reported. The process consists of two stages. In the first stage, high quality SU-8 master moulds and their negative replicas from soft moulds are produced using photolithography and soft moulding techniques respectively. The second stage includes preparation of stainless steel slurry, filling the soft mould, obtaining the green parts, de-binding and sintering to the finial parts. A method is proposed in this research to obtain the optimum dispersant for preparation of the metallic slurry and the result was found to be 0.003 (dispersant/powder wt.). Both vacuum and forming gas atmosphere sintering conditions were investigated. The results show micro components have the similar high quality as the master moulds. The maximum sintered density was found to be 98.1% when the sample was sintered at 1, 350 ∘C in vacuum.
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Beeby, S., Enell, G., Kraft, M., White, N.: MEMS Mechanical Sensors. London Artech House Inc., London (2004)
Mappes, T., Worgull, M., Heckele, M.: Submicron polymer structures with X-ray lithography and hot embossing. J. Mohr. Microsyst. Technol. 14, 1721–1725 (2008)
Sheu, D.Y.: High-speed micro electrode tool fabrication by a twin-wire EDM system. J. Micromech. Microeng. 18, 1–5 (2008)
Lee, S., Chen, Y.P., Huang, C.H.: Electroforming of metallic bipolar plates with micro-featured flow field. J. Power Sources 145, 369–375 (2005)
Gietzelt, T., Jacobi, O., Piotter, V., Ruprecht, R., Hausselt, J.: Development of a micro annular gear pump by micro powder injection molding. J. Mat. Sci. 39, 2113–2119 (2004)
Loh, N.H., Tor, S.B., Tay, B.Y., Murakoshi, Y., Maeda, R.: Fabrication of micro gear by micro powder injection molding. Microsyst. Technol. 14, 43–50 (2007)
Imbaby, M., Jiang, K., Chang, I.: Fabrication of 316-L stainless steel micro parts by softlithography and powder metallurgy. Mater. Lett. 62, 4213–4116 (2008)
Zhu, Z., Wei, X., Jiang, K.: A net-shape fabrication process of alumina micro-components using a soft lithography technique. J. Micromech. Microeng. 17, 193–198 (2007)
Castro, L., Merino, S., Levenfeld, B., Varez, A., Torralba, J.M.: Mechanical properties and pitting corrosion behaviour of 316L stainless steel parts obtained by a modified metal injection moulding process. J. Mater. Process. Technol. 144, 397–402 (2003)
Ji, C.H., Loh, N.H., Khor, K.A., Tor, S.B.: Sintering study of 316L stainless steel metal injection molding parts using Taguchi method: final density. Mater. Sci. Eng. A 311, 74–82 (2001)
Li, S., Huang, B., Li, D.Y., Liang, S., Zhou, H.: Influences of sintering atmospheres on densification process of injection moulded gas atomised 316L stainless steel. Powder Metall 46, 241–245 (2003)
Shimizu, T., Mutrakoshi, Y., Wechwiayakhlug, K.: Characterization of the molding methods and the binder system in the MIM process. J. Mater. Process. Technol. 63, 753–758 (1997)
Liu, Z., Loh, N., Tor, S., Khor, K., Murakoshi, Y., Maeda, R.: Binder system for micropowder injection molding. Mater. Lett. 48, 31–38 (2001)
Li, S., Huang, B., Li, Y., Qu, X., Liu, S., Fan, J.: A new type of binder for metal injection molding. J. Mater. Process. Technol. 137, 70–73 (2003)
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Imbaby, M., Chang, I., Jiang, K. (2010). Micro Machine Parts Fabricated from Aqueous Based Stainless Steel Slurry. In: Ao, SI., Gelman, L. (eds) Electronic Engineering and Computing Technology. Lecture Notes in Electrical Engineering, vol 60. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-8776-8_54
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DOI: https://doi.org/10.1007/978-90-481-8776-8_54
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