Microfluidic Packaging Process

  • Ebrahim Ghafar-Zadeh
  • Mohamad Sawan
Part of the Analog Circuits and Signal Processing book series (ACSP)


A CMOS-based LoC system would require efficient microfluidic packaging to protect the circuitry from the biological and chemical analytes, as well as the external environment. Microfluidic packaging is also critical to direct the fluids towards the embedded sensors or actuators for analysis. Ideally, these microfluidic packaging components, including micro-channels, -chambers, -fittings, -valves and -pumps should be performed using a low temperature process with reliable hermetic bonding [278]. The leakage of analytes (especially of charged molecules, as is the case with many bioanalytes) from microfluidic components may increase the parasitic capacitances or resistances and thus affect the circuit characteristics.


Microfluidic Channel Sacrificial Layer Rapid Prototype Technique Microfluidic Structure Polymeric Waveguide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  1. 1.Department of Electrical EngineeringEcole Polytechnique de MontréalMontrealCanada

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