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CMOS Capacitive Sensors for Lab-on-Chip Applications pp 51–90Cite as

Capacitive Interface Circuits for LoC Applications

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Part of the book series: Analog Circuits and Signal Processing ((ACSP))

Abstract

The design criteria of capacitive interface circuits for LoC applications differs from conventional MEMS based applications such as acceleration, vibration or pressure [238]. As already mentioned in Chapter 2, a movable sensing electrode should be implemented through MEMS procedures and then bonded to an interface circuit for measurement purposes, but the surface electrodes can be directly realized atop integrated circuit chip fabricated through standard CMOS technology [240]. The emphasis of this chapter is placed on describing the difference between a MEMS based capacitive sensor (MBCS), a Lab-on-Chip based capacitive sensor (LBCS) and on introducing various circuit design techniques for LBCSs.

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Authors and Affiliations

  1. Department of Electrical Engineering, Ecole Polytechnique de Montréal, Montreal, QC, Canada

    Ebrahim Ghafar-Zadeh & Mohamad Sawan

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  1. Ebrahim Ghafar-Zadeh
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Correspondence to Ebrahim Ghafar-Zadeh .

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Ghafar-Zadeh, E., Sawan, M. (2010). Capacitive Interface Circuits for LoC Applications. In: CMOS Capacitive Sensors for Lab-on-Chip Applications. Analog Circuits and Signal Processing. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3727-5_4

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  • DOI: https://doi.org/10.1007/978-90-481-3727-5_4

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