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The Elastic Properties of Ferroelectric Thin Films Measured Using Nanoindentation

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Multifunctional Polycrystalline Ferroelectric Materials

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 140))

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Abstract

Ferroelectric thin films are being used for a large number of applications such as sensors and actuators in MicroElectroMechanical Systems (MEMS) [1] and nonvolatile memories [2]. For many of their applications as actuators, they are used in the form of cantilever or membrane devices. The operation of these devices is determined by their electromechanical properties, which includes their elastic properties [3]. These properties are difficult to measure in thin film form, and often designers resort to using the properties of bulk materials with the same composition. The properties of thin films can be quite different from bulk materials because of the high texture and residual stresses in the thin films.

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Authors and Affiliations

  1. Centre for Materials Research and School of Engineering and Materials Science, Mile End Road, London, E1 4NS, UK

    C. Chima-Okereke, W. L. Roberts, A. J. Bushby & M. J. Reece

Authors
  1. C. Chima-Okereke
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  2. W. L. Roberts
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  3. A. J. Bushby
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  4. M. J. Reece
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Correspondence to C. Chima-Okereke .

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Chima-Okereke, C., Roberts, W.L., Bushby, A.J., Reece, M.J. (2011). The Elastic Properties of Ferroelectric Thin Films Measured Using Nanoindentation. In: Multifunctional Polycrystalline Ferroelectric Materials. Springer Series in Materials Science, vol 140. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-2875-4_11

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