Ultrahigh Vacuum Rotary-Motion Feedthroughs

  • E. A. DeulinEmail author
  • V. P. Mikhailov
  • Yu. V. Panfilov
  • R. A. Nevshupa
Part of the Fluid Mechanics and Its Applications book series (FMIA, volume 91)


The angular precision of the most widespread bellows-sealed rotary-motion feedthroughs is about 10 and in many cases that is not enough for the user. That is why many designers create more precise feedthroughs. An example of more precise gear is the airtight harmonic drive rotary-motion feedthrough.

This type of drive does not have a wide application, because the manufacturing process is technically complex. The flexible thin-wall gear (barrel) is the main base detail of the drive; that is difficult to master. Another reason is a short life span of this drive in vacuum.

The authors solved both problems and reduced labour-intensiveness of thin-wall gear, they made this labour-intensiveness equal to labour-intensiveness of hydro formed bellow manufacturing: they also found optimal design parameters of gear couple of harmonic drive which ensure its longevity more than 3 · 106 cycles of work.


Ball Bearing Gear Tooth Adhesive Wear Steel AISI Tooth Number 
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Copyright information

© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  • E. A. Deulin
    • 1
    Email author
  • V. P. Mikhailov
    • 1
  • Yu. V. Panfilov
    • 1
  • R. A. Nevshupa
    • 1
  1. 1.Bauman Moscow State Technical UniversityMoskvaRussia

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