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Precision of Vacuum Mechanisms

  • E. A. DeulinEmail author
  • V. P. Mikhailov
  • Yu. V. Panfilov
  • R. A. Nevshupa
Chapter
Part of the Fluid Mechanics and Its Applications book series (FMIA, volume 91)

Abstract

The required precision of vacuum installations in most technologies (thin film coating, electron beam welding, diffusionwelding) is the same as in traditional engineering industry, but operating conditions of the mechanisms work are much worse, because of vacuum and periodical outgassing baking (see Tables 1.1, 1.2, 1.4). At the same time, the equipment of surface research, electron beam-, ion beam lithography, Table 1.3, atomic force scanning microscopy, Table 1.6, requires much higher precision of the mechanisms, which should work in ultrahigh vacuum (up to 10-9 Pa).

The first peculiarity of vacuum mechanisms is the existence of additional elements in their kinematic chains including: motion feedthroughs, sealing elements, devices for baking, heating elements, holes and grooves on the coupling surfaces for the evacuation of residual gases. All these elements reduce the rigidity of the drives and generate additional disturbing forces that result in the appearance of additional components in the total error. In some cases these new error components can be 10–100 times higher (!) than the errors of basic elements of transmission.

The second peculiarity of vacuum mechanisms is, from one side, the absence of a work load as that is contrast to atmospheric machines and, from another side, the existence of large and non-constant friction forces, additional forces generated by atmospheric pressure, forces generated by deformed sealing elements. It is necessary to emphasize the accidental character of friction forces and their non-linear character as well as anisotropy of elastic sealing elements and intensive wear of friction surfaces.

Keywords

Friction Force Total Error Error Component Ball Bearing Resistance Force 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    Pronikov, A.S., Precision and Reliability of Digitally-Controlled Machines, Machinostroenie, Moscow, 1982, 250 pp. [in Russian]. Google Scholar
  2. 2.
    Dunaev P.F., The rational methods of tolerances calculation, Machine Tools and Instrument 6, 1952, 32–47 [in Russian]. Google Scholar
  3. 3.
    Baranov G.G., About the choosing of the tolerances to ensure the demanded precision and the price of the mechanism, in Institute Mashinovedemia Proceedings, Seminar of Precision in Machinebuilding, Vol. 11, Academy of USSR, Moscow, 1957, pp. 86–94 [in Russian].Google Scholar
  4. 4.
    Rasumov I.M., Economics in the Machinebuilding of USSR, The “High School” Edition, Moscow, 1982, 452 pp. [in Russian].Google Scholar
  5. 5.
    Alexandrova A.T., The theoretic base of optimal vacuum mechanisms design, Thesis of Scientific Doctoral Research, Scientific direction number 05.02.12, Moscow, 1979, 46 pp.Google Scholar
  6. 6.
    Satarov, G.K., Deulin E.A., Vasichev B.I., The electron beam lithography equipment productivity, Electronics revision, 7 Issue “Technology organization and equipment”, 1986, v. 14 (1219), TSNII, Moscow, “Electronics”, 44 pp. [in Russian].Google Scholar
  7. 7.
    Borodachev N.A., The Production Precision, Moscow, 1973, 372 pp.Google Scholar
  8. 8.
    USSR standard 1643-81, The base of design base. Cylinder gears: Tolerances. Moscow Tolerances, Moscow, 1985, 69 pp. [in Russian].Google Scholar
  9. 9.
    USSR Standard 21098-82, Kinematic chains. The methods of precision calculation. Standard, 1984, 26 pp. [in Russian].Google Scholar
  10. 10.
    Deulin E.A., Mednikov M.I., Papko V.M., Vacuum mechanisms design and calcula-tion/“Zaocny Institute ITR”, “Machinostroenie”, Moscow, 1986, 80 pp. [in Russian].Google Scholar
  11. 11.
    Deulin E.A., Pavlov A.N., The planetary vacuum feedthroughs precision increasing, High school edition, Machinebuilding 10, 1982, 37–42 [in Russian]. Google Scholar
  12. 12.
    Zdanovith T.K., The heat and mechanic action on special clean stainless steel to increase its work properties, Scientific Work Thesis, Moscow, 1985, 16 pp. [in Russian]. Google Scholar
  13. 13.
    Zaripova R.G., Kaibishev A., Salishev G.A., The properties and structure variation of stainless steel under action of crystals, Metals Research and Heat Action 9, 1993, 19–22 [in Russian]. Google Scholar
  14. 14.
    Ilichev V.Y., Startsev V.I., Shapovalov I.A., The stainless steels creep at low temperatures, in Proceedings Physical Process of Plastic Deformation at Low Temperature, Naukova dumka, Kiev USSR, 1974, pp. 358–361 [in Russian].Google Scholar
  15. 15.
    Kennedy A.Dj., Creep and tired Process in Metals (English original), USSR Ed. “Metallurgia”, Moscow, 1965, 312 pp. [in Russian].Google Scholar
  16. 16.
    Koval V.A., Low temperature creep of some metals, Thesis of Scientific Doctoral Research, Charkov, Ukrain USSR, 1975, 16 pp. [in Russian].Google Scholar
  17. 17.
    Kojevnikov V.P., Korotkova L.V., The methods of precision calculation in electronics industry, Electronics Revision 8(2) (359), TSNI “Electronics”, 1986 Moscow, 42 pp. [in Russian].Google Scholar
  18. 18.
    Kutsokon V.A. et al., The Probability Theory at the Mechanism Design Usage,USSR Leningrad, “Mashinostroenie” Edition, 1971, 260 pp [in Russian].Google Scholar
  19. 19.
    Kutsokon V.A., The Precision of Kinematik Chains of Mechanisms, USSR Leningrad, “Machinostroenie”, 1980, 221 pp. [in Russian].Google Scholar
  20. 20.
    Rabotnov Y.N., The Creep Process in mechanical Devices, Nayka, Moscow, 1966, 752 pp. [in Russian]. Google Scholar
  21. 21.
    Volchkevith L.I., Kamyshny N.I., Deulin E.A., Handbook for Students, Bauman Moscow State Technical University, Moscow, 1985, 60 pp. [in Russian]. Google Scholar
  22. 22.
    Starostin V.F., The ball movement in the ball bearing, in Proceedings of Soviet Union Bearing Research Institute (VNIINP), Vol. 1 (45), pp. 42–53 [in Russian].Google Scholar
  23. 23.
    Akchmadiev D.R., Deulin E.A., About reliability of baking ultra high vacuum mechanisms, in Proceedings 12th International Vacuum Congress, Book of Abstracts, The Hague, 1992, p. 88.Google Scholar
  24. 24.
    Deulin E.A., Usov A.B., Marusov V.A., et al., IVC-12: Book of Abstracts, The Hague, 1992, p. 80.Google Scholar
  25. 25.
    Garofalo F., Fundamentals of Creep and Creep Rupture in Metals, MacMillan, New York, 1965. Google Scholar
  26. 26.
    Sinodeev I.V., Deulin E.A., Yurkov Y.V., Research of the resistance forces in vacuum planetary rotation motion feedthroughs, Computer Edition (VNIITEMR deponent No. 3888.-18.10.85), Moscow, 1985 [in Russian].Google Scholar
  27. 27.
    Fursak F.I., The small inertia of harmonic rotary drive research, Thesis of Scientific Ddoctoral Research, Moscow, 1973, 16 pp. [in Russian].Google Scholar
  28. 28.
    Firsaev A.F., The design of the harmonic rotation gear drive of the computer based lathes, Thesis of Scientific Doctoral Research, Moscow, 1983, 16 pp. [in Russian].Google Scholar
  29. 29.
    Chernianski P.M., The Metal Cutting Lathes Rigidity, Bauman Moscow State Technical University, Moscow, 1969, 80 pp. [in Russian]. Google Scholar
  30. 30.
    Chernova L.S. et al., The precision of different harmonic rotation drives research, in Proceedings of Leningrad Conference, Leningrad, 1968, pp. 110–115 [in Russian].Google Scholar
  31. 31.
    Chernianski P.M., The rigidity of statically varied system research, Machine Building 8, 1981, 127–130 [in Russian]. Google Scholar
  32. 32.
    Chernianski P.M., The scientific base of high precision of the mechanically loaded lathes, Thesis of Scientific Doctoral Research, Moscow, 1986, 32 pp. [in Russian]. Google Scholar
  33. 33.
    Shuvalov S.A. et al., The parameters of precision and rigidity of harmonic rotary drive, Machine Building 6, 1970, 56–62 [in Russian]. Google Scholar
  34. 34.
    Push V.E., The dynamic of lathes, Mechanical Engineering, 1968, 560 [in Russian].Google Scholar
  35. 35.
    Deulin, E.A., Mechanics and Physics of Precise Vacuum Mechanisms, Vol. 1, Vladimir State University, 2001, 176 pp. [in Russian].Google Scholar

Copyright information

© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  • E. A. Deulin
    • 1
    Email author
  • V. P. Mikhailov
    • 1
  • Yu. V. Panfilov
    • 1
  • R. A. Nevshupa
    • 1
  1. 1.Bauman Moscow State Technical UniversityMoskvaRussia

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