Typical Vacuum Mechanisms

  • E. A. DeulinEmail author
  • V. P. Mikhailov
  • Yu. V. Panfilov
  • R. A. Nevshupa
Part of the Fluid Mechanics and Its Applications book series (FMIA, volume 91)


The vacuum mechanisms are used in vacuum technological equipment described in Chapter 1 for transportation of components (samples, wafers, cathodes, etc.) from one working position to another, for their orientation and positioning against the instruments (electron-, ion-, molecular, X-ray beam), or for their positioning against other components (for example, cathode against anode of the gauge). In scanning microscopy they are used for the instrument (probe or cantilever) positioning and scanning of the analyzed surface. In most cases it is enough to have one or two degrees of freedom (linear motion and rotation). However, some technological processes (surface analysis, scanning nanomicroscopy, X-ray lithography) require 3–6 degrees of freedom.

The main element in any vacuum mechanism is the motion feedthrough which plays a role of the mechanical element of transmission as well as a sealing element. It is the most critical mechanical element of the kinematic chain of the drive because it controls the required precision of the mechanism and at the same time it should protect vacuum elements against the atmospheric air. In many cases the motion feedthrough plays a role of the final vacuum mechanism on a technological position.

In some cases for small micro- or nanotravels independent piezo drive situated in the vacuum chamber can be used. In these cases vacuum feedthroughs are not used.


Ball Bearing Kinematic Chain Ultrahigh Vacuum Output Shaft Kinematic Pair 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    A. Roth, Vacuum Technology, 3rd ed., North-Holland, Amsterdam, 1990.Google Scholar
  2. 2.
    Booklet of Edvards Vacuum Equipment Co., Crawly (England), V. 12, #91, p. 132.Google Scholar
  3. 3.
    R.R. Wilson, A vacuum-tight sliding seal, Rev. Sci. Instr. 12, #91, 1941, pp. 9193.Google Scholar
  4. 4.
    Booklet of ULVAC, Rotary motion feedthrough, Model TDU-8, NE2302, Tokyo, 1977, 2 pp.Google Scholar
  5. 5.
    Booklet of Leisk, RM Series Rotary motions, 04.003.180, Burgess Hill, England,1981, 2 pp.Google Scholar
  6. 6.
    Booklet of Vacuum Generators, “Vacuum Component Booklet. Rotary Drives”, Hastings (England), 1981, 320 pp.Google Scholar
  7. 7.
    Booklet of Varian, “Varian Vacuum Products”, Italy, 1995/1996, pp. 445–446.Google Scholar
  8. 8.
    Booklet of Riber, UHV Short Form, 608.10C.22, Manipulation: Single Motion Feedthrough, RUEL Malmaison (France), 1988, 38 pp.Google Scholar
  9. 9.
    Booklet of Riber.Google Scholar
  10. 10.
    Booklet of Leybold-Heraeus, Schiebedruckfuhring. Kat.# 882/29, Hanau (Germany), 1986, pp. 11–12.Google Scholar
  11. 11.
    Booklet of MECA, Traversees de Rotation Brochure #0913, Vermouvillet (France), 1990, 2 pp.Google Scholar
  12. 12.
    E.A. Deulin, N.S. Vagin, Wear and longevity of UHV harmonic rotary feedthrough, ECASIA97, Goteborg (Sweden), 1997, pp. 1147–1150.Google Scholar
  13. 13.
    E.A. Deulin, N.S. Vagin, UHV harmonic rotary feedthrough of high reliability, Vacuum Technique and Technology 8(12), 1997, pp. 17–23 [in Russian].Google Scholar
  14. 14.
    E. De Haas, The harmonic drive as UHV rotary motion feedthrough, Nuclear Instr. and Methods 137, 1976, pp. 435–439.CrossRefGoogle Scholar
  15. 15.
    Y. Hayashi, Development of the harmonic drive rotary feedthrough, Vacuum 41, 1990, pp. 1948–1950.CrossRefGoogle Scholar
  16. 16.
    Booklet of Leisk, Custom Built Motions, 04.006.984, Burgess Hill (England), 1981, 2 pp.Google Scholar
  17. 17.
    Booklet of Leisk, MIRM Series Magnetically Coupled Linear-Rotary Motion, 04.005.287, Burgess Hill (England), 1981, 2 pp.Google Scholar
  18. 18.
    D.V. Bushenin, E.A. Deulin, S.P. Nosatov et al., Design of Screw Mechanism. Methodological Recommendations, Vladimir, 1979, 129 pp.Google Scholar
  19. 19.
    Booklet of “MECA”, Transfer Rods. Preliminary brochure 4015, Vermovillet (France), 1990, 2 pp.Google Scholar
  20. 20.
    E.A. Deulin, Mechanics and Physics of Precise Vacuum Mechanisms, Vladimir State Univ., Vladimir, 2001, Vol. 1, 176 pp.Google Scholar
  21. 21.
    J. Brinker, Mega benefits, microsystems, Sandia Technology 1(2), 1999, pp. 2–6.Google Scholar
  22. 22.
    S. Rodgers, J. Sniegowski, Building a better microsystem, Sandia Technology 1(4), 1999, pp. 8–9.Google Scholar
  23. 23.
    J. Vitko, At Sandia. Microsystem abound, Sandia Technology 1(2), 1999, pp. 8–16.Google Scholar

Copyright information

© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  • E. A. Deulin
    • 1
    Email author
  • V. P. Mikhailov
    • 1
  • Yu. V. Panfilov
    • 1
  • R. A. Nevshupa
    • 1
  1. 1.Bauman Moscow State Technical UniversityMoskvaRussia

Personalised recommendations