Flow of Microparticles Originating from Mechanisms in Vacuum
The theoretical foundation of the formation and distribution of the flow of small dispersible particles in vacuum  creates some insight in different sorts of behaviour of powder-like micro particles at normal atmospheric pressure and at different pressure ranges: from normal atmospheric pressure to high vacuum. The behaviour of powder-like micro particles as a result of the action of residual gas molecules is also discussed. The basic positions of the theory can be formulated as the following:
(1) The microparticle flows can be divided into primary and secondary ones. The secondary flows are formed from monolithic materials and from solid films during mechanism operation in vacuum.
Their interaction with residual gas environment depends on random collisions with gas molecules. The secondary flows are formed from primary microparticles which are detached from surfaces inside vacuum chambers and which are transferred together with the pumped gas or together with an inlet gas flow in a process of aerodynamic interaction.
(2) The process of newly formed debris as a result of primary flow action can be presented in three stages (Figure 10.1): generation of microparticles, transport of microparticles from their source to the surface of the product. The generation of small dispersible particles is a random process which is described by the corresponding laws of distribution of microparticles number, size dp distribution, distribution of direction and velocity Vp of microparticles detachment, electric charge and magnetic moment distribution.
KeywordsVacuum Chamber Adhesive Force Solid Lubricant Aerodynamic Interaction Lubricant Type
Unable to display preview. Download preview PDF.
- 1.Panfilov Y.V., The theoretical basis of small dispersed particles forming and distribution in vacuum, in BMSTU Proceedings, Mashinostroenie, Moscow, Vol. 2, 1993, pp. 87–94 [in Russian]. Google Scholar
- 2.Panfilov Y.V., Design of vacuum technological equipment for ultralarge integral schemes manufacturing according criteria of minimal introduced unsoundness, Electronic Technic., Serial 3, Microelectronics, Moscow, 1990, Vol. 1 (135), pp. 51–59 [in Russian].Google Scholar
- 3.Malgin S.N., Panfilov Y.V., Cluster equipment in electronics, Electronic Technology Reviews, Serial 7, 1994, Vol. 1 (1701), 120 pp. [in Russian].Google Scholar