Preparation and Properties of the Y-Ba-Cu-O Thin Films
We investigated superconducting YBa2Cu3Oy (YBCO) thin films, which were prepared with two synthetic processes using rf-magnetron sputtering :(a)deposition at low substrate temperature with post-annealing at around 900°C and (b)deposition at high substrate temperature around 650°C with or without post-annealing. We obtained the high Tc superconducting YBCO thin films with each process.The films prepared with process(a) had, however, poor Jc below 10A/cm2 at 77K and their surfaces were rough. On the other hand, the films prepared with process(b) had higher Jc and smoother surfaces than those with process(a). Further improvement in surface morphology was made by raising substrate temperature to 700°C at the start of the deposition.
KeywordsSubstrate Temperature Superconducting Property Synthetic Process High Substrate Temperature YBCO Thin Film
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- K.Tsuda, M.Muroi, T.Matsui, Y.Koinuma ,M.Nagano and K.Mukae, Proceedings of the International Conference on High Temperature Superconductors and Materials and Mechanisms of Superconductivity 788,1988Google Scholar