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Technology CAD Systems pp 83–111Cite as

A TCAD Framework for Development and Manufacturing

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Abstract

The semiconductor manufacturing engineer is often faced with the problems of process integration, equipment control, parametric yield diagnosis, process centering, worst-case design, and device parameter extraction. These problems require the use of technology CAD (TCAD) tools across a spectrum of speed and accuracy. We have developed a specialized TCAD framework to integrate the required tools and auxiliary software into a system that is convenient for everyday use. The initial work was embodied in the PREDITOR system, and has now evolved into pdFab, a commercial product. In this paper, we will describe the PREDITOR and pdFab systems, and show experimental results of using pdFab on industrial problems.

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Author information

Authors and Affiliations

  1. Dept. of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, 15213, USA

    D. M. H. Walker, J. K. Kibarian, Ch. S. Kellen & A. J. Strojwas

  2. PDF Solutions, Pittsburgh, PA, USA

    J. K. Kibarian

Authors
  1. D. M. H. Walker
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  2. J. K. Kibarian
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  3. Ch. S. Kellen
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  4. A. J. Strojwas
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Editor information

Editors and Affiliations

  1. Institut für Mikroelektronik, Technische Universität Wien, Austria

    Franz Fasching , Stefan Halama  & Siegfried Selberherr ,  & 

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© 1993 Springer-Verlag/Wien

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Walker, D.M.H., Kibarian, J.K., Kellen, C.S., Strojwas, A.J. (1993). A TCAD Framework for Development and Manufacturing. In: Fasching, F., Halama, S., Selberherr, S. (eds) Technology CAD Systems. Springer, Vienna. https://doi.org/10.1007/978-3-7091-9315-0_5

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  • DOI: https://doi.org/10.1007/978-3-7091-9315-0_5

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-7091-9317-4

  • Online ISBN: 978-3-7091-9315-0

  • eBook Packages: Springer Book Archive

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