A Systematic and Physically Based Method of Extracting a Unified Parameter Set for a Point-Defect Diffusion Model
A systematic and physically based method for extracting of a unified parameter set for a point-defect diffusion model is proposed. A sensitivity matrix analysis is used to construct the sequence of the extraction and to select the data set to be fitted.
KeywordsSink Term Unify Parameter Intrinsic Diffusion Short Channel Effect Impurity Cluster
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