Abstract
The equipment for the fabrication of semiconductor devices has become sophisticated and thus, the field of competition of the technologies considered up to now has changed. The author analyzes the causes of the changes in the competition fields and a solution is proposed from the view point of the TCAD technology. The purpose and activity of TCAD in Selete is also described. Selete is a stock company established by the LSI manufacturers(*).
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
P. M. Fahey, P. B. Griffin, and D. Plummer, Review of Modern Physics, Vol. 61, No. 2, pp. 289–384, 1989
J.P. Peng, et al., Proc. 2nd Int. Symp. on Process Phys. and Modeling in Semiconductor Technology, Electrochem. Soc., Pennington, NJ., p. 772, 1990
M. D. Giles, J. Electrochem. Soc., Vol. 138, No. 4, pp 1160–1165, 1991
S. Selberherr, Analysis and Simulation of Semiconductor Devices, Springer- Verlag, New York, 1984
G.K. Wachutka, IEEE Trans, on Computer-Aided Design, Vol. 9, no. 11, pp. 1141–1149, 1990
G. A. Baraff, Phys. Rev., Vol. 128, No. 6, p. 2507, 1962
R. Kuhnert et al., IEEE Trans. ED-32, No. 6, p. 1057, 1985
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1998 Springer-Verlag/Wien
About this paper
Cite this paper
Kotani, N. (1998). TCAD in Selete. In: De Meyer, K., Biesemans, S. (eds) Simulation of Semiconductor Processes and Devices 1998. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6827-1_2
Download citation
DOI: https://doi.org/10.1007/978-3-7091-6827-1_2
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-7415-9
Online ISBN: 978-3-7091-6827-1
eBook Packages: Springer Book Archive