Abstract
The Semiconductor Research Corporation (SRC) is a consortium that manages IC manufacturing related research. The membership consists of IC manufacturing companies, their suppliers, and a number of affliated companies. Most of the research is conducted at US universities. Research partnerships exist with various organizations such as SEMATECH, the National Laboratories, NIST, DARPA, the State of New York. The SRC is presently organized into 7 science areas: (1) Process Integration, Devices, and Structures; (2) Materials and Bulk Processes; (3) Lithography; (4) Design; (5) Packaging; (6) Factory Automation; (7) Environmental Health & Safety. In addition, the SRC is a partner in the Center for Semiconductor Modeling k Simulation with Los Alamos and Sandia National Laboratories.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1998 Springer-Verlag/Wien
About this paper
Cite this paper
Goossens, R. (1998). TCAD at the SRC. In: De Meyer, K., Biesemans, S. (eds) Simulation of Semiconductor Processes and Devices 1998. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6827-1_1
Download citation
DOI: https://doi.org/10.1007/978-3-7091-6827-1_1
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-7415-9
Online ISBN: 978-3-7091-6827-1
eBook Packages: Springer Book Archive