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Quantitative Electron Probe Microanalysis of Multi-layer Structures

  • Conference paper
Electron Microbeam Analysis

Part of the book series: Mikrochimica Acta ((MIKROCHIMICA,volume 12))

Abstract

A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.

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References

  1. G. F. Bastin, H. J. M. Heijligers, Scanning 1990, 12, 225.

    Article  CAS  Google Scholar 

  2. R. H. Packwood, J. D. Brown, X-Ray Spectrom. 1981, 10,138.

    Article  CAS  Google Scholar 

  3. G. F. Bastin, H. J. M. Heijligers, in: Electron Probe Quantitation (K. F. J. Heinrick, D. E. Newbury, eds.), Plenum, New York, 1991, p. 145.

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  4. W. Reuter, J. D. Kuptsis, A. Lurio, D. F. Kyser, J. Phys. D: Appl. Phys. 1978, 11,2633.

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Author information

Authors and Affiliations

  1. Laboratory of Solid State Chemistry and Materials Science, University of Technology Eindhoven, NL-5600, MB, Eindhoven, The Netherlands, P.O. Box 513

    Guillaume F. Bastin, Johannes M. Dijkstra, Hans J. M. Heijligers & Dick Klepper

Authors
  1. Guillaume F. Bastin
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  2. Johannes M. Dijkstra
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  3. Hans J. M. Heijligers
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  4. Dick Klepper
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Editor information

Editors and Affiliations

  1. Agricultural Research Department (DLO-NL), State Institute for Quality Control of Agricultural Products (RIKILT-DLO), Wageningen, The Netherlands

    Abraham Boekestein (Head Department Instrumental Analysis) (Head Department Instrumental Analysis)

  2. Institute of Mineralogy, University of Salzburg, Austria

    Miodrag K. Pavićević

  3. Faculty of Mining and Geology, University of Belgrade, Yugoslavia

    Miodrag K. Pavićević

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© 1992 Springer-Verlag Wien

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Cite this paper

Bastin, G.F., Dijkstra, J.M., Heijligers, H.J.M., Klepper, D. (1992). Quantitative Electron Probe Microanalysis of Multi-layer Structures. In: Boekestein, A., Pavićević, M.K. (eds) Electron Microbeam Analysis. Mikrochimica Acta, vol 12. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6679-6_6

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  • DOI: https://doi.org/10.1007/978-3-7091-6679-6_6

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-82359-0

  • Online ISBN: 978-3-7091-6679-6

  • eBook Packages: Springer Book Archive

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