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Monte Carlo Simulation of Backscattered and Secondary Electron Profiles

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Electron Microbeam Analysis

Part of the book series: Mikrochimica Acta ((MIKROCHIMICA,volume 12))

Abstract

A model of the Monte Carlo simulation is used for calculating profiles of the backscattered electron intensity and the secondary electron yield caused by the scanning electron beam. In order to get a fast yield calculation a simple procedure has been developed to describe the escape of secondary electrons. In the present paper first simulations are discussed with the aim of comparing backscattered electron and secondary electron profiles of wall and trench structures. Special attention is given to the influence of the shape of the target surface topography on the electron backscattering and secondary emission.

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References

  1. L. Reimer, M. Riepenhausen, M. Schierjott, Scanning 1986,8, 164.

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  2. D. C. Joy, Scanning Microscopy 1988, 2,57.

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  3. M. Kotera, T. Kishida, T. Fujiwara, H. Suga, D. W. Wittry, in: 12th Int. Congress X-ray Optics Microanal. Vol. 1, Cracow 1989, p. 231.

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  4. U. Werner, J. Heydenreich, Ultramicroscopy 1984, 15,17.

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Author information

Authors and Affiliations

  1. Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, Federal Republic of Germany, D-O-4020, Halle

    Christian Eisenschmidt & Ulf Werner

Authors
  1. Christian Eisenschmidt
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  2. Ulf Werner
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Editor information

Editors and Affiliations

  1. Agricultural Research Department (DLO-NL), State Institute for Quality Control of Agricultural Products (RIKILT-DLO), Wageningen, The Netherlands

    Abraham Boekestein (Head Department Instrumental Analysis) (Head Department Instrumental Analysis)

  2. Institute of Mineralogy, University of Salzburg, Austria

    Miodrag K. Pavićević

  3. Faculty of Mining and Geology, University of Belgrade, Yugoslavia

    Miodrag K. Pavićević

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© 1992 Springer-Verlag Wien

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Eisenschmidt, C., Werner, U. (1992). Monte Carlo Simulation of Backscattered and Secondary Electron Profiles. In: Boekestein, A., Pavićević, M.K. (eds) Electron Microbeam Analysis. Mikrochimica Acta, vol 12. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6679-6_10

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  • DOI: https://doi.org/10.1007/978-3-7091-6679-6_10

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-82359-0

  • Online ISBN: 978-3-7091-6679-6

  • eBook Packages: Springer Book Archive

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