Abstract
This paper investigates numerical error due to time and spatial discretization. The relative error contributions of each discretization scheme is examined. Two algorithms are then introduced to control the error due to each modelling discretization scheme.
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© 1995 Springer-Verlag Wien
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Rueda, H.A., Law, M.E. (1995). Algorithms for the Reduction of Surface Evolution Discretization Error. In: Ryssel, H., Pichler, P. (eds) Simulation of Semiconductor Devices and Processes. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6619-2_10
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DOI: https://doi.org/10.1007/978-3-7091-6619-2_10
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-7363-3
Online ISBN: 978-3-7091-6619-2
eBook Packages: Springer Book Archive