Abstract
A quasi 3-dimensional Monte Carlo simulation program, called SESAME, has been developed for the simulation of electron-matter interactions in totally arbitrary 2-dimensional structures. SESAME is designed for application in different analysis techniques, like scanning electron microscopy (SEM), electron probe microanalysis (EPMA), energy and wavelength dispersive X-ray spectroscopy (EDS/WDS), Auger electron spectroscopy (AES), transmission electron microscopy (TEM), electron energy loss spectroscopy (EELS), etc.. The program is extremely flexible in terms of simulation geometries as well as in terms of possessing the ability to handle the majority of electron-matter interaction processes. A modified quadtree discretization for geometry handling is used. Three different scattering models have been implemented to account for the great variety of possible applications.
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© 1996 Springer-Verlag Wien
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Schiebl, C.O., Pfeiffer, A., Wagner, H.W., Werner, W.S.M., Stippel, H. (1996). Monte Carlo Simulation of Electron Scattering for Arbitrary 2D Structures Using a Modified Quadtree Geometry Discretization. In: Benoit, D., Bresse, JF., Van’t dack, L., Werner, H., Wernisch, J. (eds) Microbeam and Nanobeam Analysis. Mikrochimica Acta Supplement, vol 13. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6555-3_48
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DOI: https://doi.org/10.1007/978-3-7091-6555-3_48
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