Abstract
Energy and angular spectra of secondary ions ejected from solid surfaces under a few-keV ion beam bombardment are discussed with regard to application for studying the physical processes involved in sputtering and secondary ion emission.
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© 1996 Springer-Verlag Wien
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Kosyachkov, A.A. (1996). High Energy and Angular Resolution Dynamic Secondary Ion Mass Spectrometry. In: Benoit, D., Bresse, JF., Van’t dack, L., Werner, H., Wernisch, J. (eds) Microbeam and Nanobeam Analysis. Mikrochimica Acta Supplement, vol 13. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6555-3_31
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DOI: https://doi.org/10.1007/978-3-7091-6555-3_31
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