Abstract
Advances in Microelectronic technology, especially sensor- and actuator technology, have resulted in the development of integrated circuits which, in addition to microelectronics and transducers, contain mechanical and optical components. Consequently it has become possible to develop complex systems by coupling these new components with conventional microelectronic components and systems. The construction of these systems necessitates changes in the design and manufacturing process. This paper concentrates on the changes necessary, especially in the design process, to meet the challenges of this new field of microsystems (i.e., microelectromechanical systems, micromechatronics).
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References
DeMan, H. (1990): Microsystems: A Challenge for CAD Development. In: Microsystems Technologies 90, H. Reichl ed., Springer Verlag Berlin, pp. 3–8
Hartmanis, J., Stearns, R.E. (1966): Algebraic Structure Theory of Sequential Machines. Prentice Hall, Inc. Englewood Cliffs, N.J.
Krener, A.J. (1975a): Local approximation of control systems. Journal of Differential Equations 19: 125–133
Krener, A.J. (1975b): A decomposition theory for differential systems. In: Proceedings of the IFAC 6th World Congress, Boston, August 24–30, 1975. Part 1, Theory, paper 36.5
Mesarovic, M.D., Takahara, Y. (1975): General Systems Theory: Mathematical Foundations. Academic Press, New York
Müller-Wipperfürth, T. (1994a): Finite State Machine Structuring with CAST.FSM applied to VLSI controller Design. PhD thesis, Johannes Kepler University, Linz, Austria
Müller-Wipperfürth, T. (1994b): On the Integration of CAST. FSM into the VLSI Design Process. In: T.I. Oeren and G.J. Klir, editors, Proceedings CAST’94, Ottawa, Springer Verlag Berlin, pp. 363–372 (Lecture Notes in Computer Science, volume 1105)
Pichler, F. (1975): Mathematische Systemtheorie: Dynamische Konstruktionen. Walter de Gruyter Berlin New York
Pichler, F. (1976): On the decomposition of linear dynamical systems. In: Proceedings of the 3rd European Meeting on Cybernetics and Systems Research, pp. 445–454 (Hemisphere Publishing Corporation Washington)
Pichler, F. (1983): Dynamical Systems Theory. In: Cybernetics: Theory and Applications (ed. R. Trappl), Springer Verlag Berlin, pp. 43–56
Salovaara, S. (1967): On Set Theoretical Foundations of System Theory. Acta Polytechnica Scandinavia, Mathematics and Computing Machinery Series No. 15, Helsinki
Zunde, P., Pichler, F. (1982): Complete characterization of State space decompositions of linear dynamical systems. In: F.R. Pichler and R. Trappl, editors, Progress in Cybernetics and Systems Research, volume VI, Hemisphere Publishing Corporation, Washington, pp. 380–388
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Pichler, F. (1998). Design of Microsystems: Systems-theoretical Aspects. In: Albrecht, R. (eds) Systems: Theory and Practice. Advances in Computing Science. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6451-8_5
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DOI: https://doi.org/10.1007/978-3-7091-6451-8_5
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-83206-6
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