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Application of the Methodology: A Sample Scenario

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Abstract

In this chapter a practical application of the methodology at the Institute of Electron Technology (ITE) (http://www.ite.waw.pl, 2013 [10]) is presented. The ITE is a major Polish R&D center in the field of semiconductor electronics and physics with a focus on development of innovative micro- and nano-technologies and systems, and their applications in microelectronics, optoelectronics, photonics, and micro/nano-systems. For technology qualification it is equipped with a MEMS/CMOS pilot production line. The real case scenario presented in this chapter is a special test scenario based on a former customer requested project and has mainly been executed within the EU project CORONA. As such, it does not follow usual ITE development procedures, but an adapted set of a specific combination of the product development method Stage-Gate® and the project management method PRINCE2® described in this book. Besides that, it is exemplary for most customer-driven development projects at ITE. The reuse of a former customer project experiences and technologies allows the direct comparison of the new CORONA-based methodology and the usual applied procedures during the product engineering process at ITE. The scenario on the basis of gathered experiences presented in this chapter reveals as a promising, novel approach for product engineering, especially in the context of MNT. Because of several licensing issues and NDA constraints some specific details of the design flow have to stay unmentioned but the main impact of the methodology should become visible.

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References

  1. Bieniek, T., Janczyk, G., Grabiec, P., Szynka, J., Kalicinski, S., Janus, P.: Micro and nano device - customer-oriented product e-engineering in e-CoFrame. In: eChallenges e-2010 Conference Proceedings, Warszawa, 27–29 October 2010 (2010). IEEExplore, New York

    Google Scholar 

  2. Bieniek, T., Janczyk, G., Grabiec, P., Szynka, J., Kalicinski, S., Janus, P., Domanski, K., Sierakowski, A., Ekwinska, M., Szmigiel, D., Tomaszewski, D., Holzer, G., Schropfer, G.: Customer-oriented product engineering of micro and nano devices. In: Proceedings of the 17th International Conference on Mixed Design of Integrated Circuits and Systems (MIXDES), Wroclaw, Poland, 24–26 June 2010, pp. 81–84. IEEExplore, New York (2010)

    Google Scholar 

  3. Bieniek, T., Janczyk, G., Kalicinski, S., Janus, P., Domanski, K., Grabiec, P., Szynka, J.: Methodology and tools for customer-oriented product engineering of micro and nano devices. In: Proceedings of the 10th Conference “Electron Technology” ELTE 2010, CD, Wroclaw, Poland, 22–25 September 2010 (2010)

    Google Scholar 

  4. Bieniek, T., Janczyk, G., Janus, P., Szynka, J., Grabiec, P.: Determination of electrical and mechanical parameters in capacitive MEMS accelerometers using electrical measurements. In: Smart Systems Integration 2009, pp. 1192–1197. VDE Verlag GmbH, Berlin (2011)

    Google Scholar 

  5. Bieniek, T., Janczyk, G., Grabiec, P., Szynka, J., Kaliciński, S., Janus, P.: Methodology and tools for customer-oriented micro and nanodevices efficient product development. In: Proceedings of the 2nd International Conference Engineering and Meta-Engineering, Orlando, 27–30 March 2011, pp. 56–61 (2011)

    Google Scholar 

  6. COMSOL: Comsol – more info available at http://www.comsol.com (2013). Accessed 10 April 2013

  7. Coventor, Inc.: Coventor Home Page. http://www.coventor.com (2013). Accessed 10 April 2013

  8. EUROPRACTICE: Europractice service. http://www.europractice.com (2013). Accessed 10 April 2013

  9. Holzer, G., Knechtel, R., Breit, S., Schropfer, G.: 3-D process modeling - a noveland efficient tool for MEMS foundry design support. In: Advanced Semiconductor Manufacturing Conference, ASMC ’09, IEEE/SEMI, pp. 200–205 (2009)

    Google Scholar 

  10. ITE: InstytutTechnologiiElektronowej – more info available at http://www.ite.waw.pl (2013). Accessed 10 April 2013

  11. Janczyk, G., Bieniek, T., Szynka, J., Grabiec, P.: Integrated thermal modeling of heterogeneous eCubes stacked devices. In: Proceedings of the Conference THERMINIC 2008 - 14th International Workshop on Thermal Investigations of ICs and Systems, Roma, Italy, 24–26 September 2008, pp. 80–84 (2008)

    Google Scholar 

  12. Janczyk, G., Bieniek, T., Szynka, J., Grabiec, P., Janus, P., Kalicinski, S.: Micro and nano device reliability control by MOS transistors mechanical stress sensitivity estimation and flexible, customer oriented product engineering flow. In: IEEE International Reliability Workshop (IIRW10), South Lake Tahoe 17–21 October 2010 (2010)

    Google Scholar 

  13. Janczyk, G., Bieniek, T., Grabiec, P., Wymyslowski, A., Swierczynski, R.: Optimization on MEMS-IC SiP development reliable design methods. In: Proceedings of the International Workshop on Testing Three-Dimensional Stacked Integrated Circuits 3D-TEST in Conjunction with ITC, Anaheim, 4–11 November 2012 (2012)

    Google Scholar 

  14. Kaliciński, S., Bieniek, T., Janus, P., Grabiec, P.: Reliability issues in modeling and simulations of the heterogeneous integrated systems. Microelectron. Reliabil. 69, 428–431 (2009)

    Google Scholar 

  15. Kalicinski, S., Janus, P., Bieniek, T., Domanski, K., Ekwinska, M., Sierakowski, A., Szmigiel, D., Grabiec, P.: Rapid prototyping of electrostatically-driven MEMS. Elektronika LI(6), 114–115 (2010)

    Google Scholar 

  16. Kalicinski, S., Bieniek, T., Janus, P., Grabiec, P.: Determination of electrical and mechanical parameters in capacitive MEMS accelerometers using electrical measurements. Microelectron. Reliab. 51, 1192–1197 (2011)

    Article  Google Scholar 

  17. Process Relations GmbH, XperiDesk – more info available at, http://www.process-relations.com (2012). Accessed 10 April 2013

  18. X-FAB: More info available at www.xfab.com (2013). Accessed 10 April 2013

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Ortloff, D., Schmidt, T., Hahn, K., Bieniek, T., Janczyk, G., Brück, R. (2014). Application of the Methodology: A Sample Scenario. In: MEMS Product Engineering. Springer, Vienna. https://doi.org/10.1007/978-3-7091-0706-5_7

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  • DOI: https://doi.org/10.1007/978-3-7091-0706-5_7

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  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-7091-0705-8

  • Online ISBN: 978-3-7091-0706-5

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