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Epitaxial Growth of Metals on Semiconductors Via Electrodeposition

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Nanofabrication

Abstract

This chapter reviews the literature on the epitaxial growth of metals on semiconductors by electrodeposition. The known examples for Si and GaAs are described with results from in-situ characterization of their surfaces prior and during metal growth in aqueous electrolytes. The application of electrodeposition to semiconductor nanowire contact formation is introduced.

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Acknowledgments

The author thanks SFU student collaborators Bao, Majumder, Chao, Ahktari-Zavareh, Grist, Spiga, Shaw, Berring, Radich, Bratvold, Cheng, Jensen, and Abbet. She is also grateful for many useful discussions with attendees of the Gordan Conferences on Electrodeposition, and funding support from NSERC.

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Authors and Affiliations

  1. Department of Physics, Simon Fraser University, Burnaby, BC, Canada

    Karen L. Kavanagh

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  1. Karen L. Kavanagh
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Correspondence to Karen L. Kavanagh .

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Editors and Affiliations

  1. , National Research Council of Canada, National Institute for Nanotechnology, Saskatchewan Drive 1142, Edmonton, T6G 2M9, Alberta, Canada

    Maria Stepanova

  2. , Electrical and Computer Engineering, University of Alberta, Edmonton, T6G 2V4, Alberta, Canada

    Steven Dew

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Kavanagh, K.L. (2012). Epitaxial Growth of Metals on Semiconductors Via Electrodeposition. In: Stepanova, M., Dew, S. (eds) Nanofabrication. Springer, Vienna. https://doi.org/10.1007/978-3-7091-0424-8_9

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