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Nanotechnologie und Nanoprozesse pp 167–242Cite as

Nanostrukturierung

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Zusammenfassung

Die Übersicht zu den technologischen Verfahren der Nanotechnolgie beinhaltet die Nanopolitur, die Trockenätztechniken und Lithographieverfahren, fokussierte Ionenstrahltechniken, Nano-Imprint- und Rastermikroskopie. Anhand von Beispielen werden die jeweiligen Techniken erläutert und ihre Einsatzgebiete vorgestellt.

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  • DOI: 10.1007/978-3-662-48908-6_7
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Author information

Authors and Affiliations

  1. Universität Paderborn, Warburger Str. 100, 33098, Paderborn, Deutschland

    Ulrich Hilleringmann

  2. Bergische Universität Wuppertal, Rainer-Gruenter-Str. 21, 42119, Wuppertal, Deutschland

    Hella-Christin Scheer

  3. FernUniversität Hagen, Haldenerstr. 182, 58084, Hagen, Deutschland

    Wolfgang R. Fahrner

  4. Ruhr-Universität Bochum, Universitätsstr. 150, NB03/58, 44780, Bochum, Deutschland

    Andreas Dirk Wieck

Authors
  1. Wolfgang R. Fahrner
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  2. Ulrich Hilleringmann
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  3. Hella-Christin Scheer
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  4. Andreas Dirk Wieck
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Correspondence to Wolfgang R. Fahrner .

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Editors and Affiliations

  1. Hagen, Germany

    Prof. Dr. Wolfgang Fahrner

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Fahrner, W.R., Hilleringmann, U., Scheer, HC., Wieck, A.D. (2017). Nanostrukturierung. In: Fahrner, W. (eds) Nanotechnologie und Nanoprozesse. Springer Vieweg, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-48908-6_7

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