Abstract
This chapter covers the arrangement of strain gauges from metals as well as from doped silicon on circular and square membranes and includes the effect of the shape change of membranes occurring when they are deflected. The calculations presented here will help when the deflection of membranes is to be measured especially for pressure sensors.
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© 2015 Springer-Verlag Berlin Heidelberg
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Schomburg, W.K. (2015). Strain Gauges on Membranes. In: Introduction to Microsystem Design. RWTHedition. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-47023-7_8
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DOI: https://doi.org/10.1007/978-3-662-47023-7_8
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-47022-0
Online ISBN: 978-3-662-47023-7
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