Abstract
Diffraction, refraction, reflection, interference, total reflection, and evanescent light are introduced and described by equations. Light transmission through wave guides and grids is discussed as well as micro spectrometers, Rowland circle, blaze, Fabry-Perot and Mach-Zehnder interferometer, Pockels cell und Kerr cell.
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© 2015 Springer-Verlag Berlin Heidelberg
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Schomburg, W.K. (2015). Micro Optics. In: Introduction to Microsystem Design. RWTHedition. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-47023-7_15
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DOI: https://doi.org/10.1007/978-3-662-47023-7_15
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-47022-0
Online ISBN: 978-3-662-47023-7
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