Abstract
Microsystems are today key components for many industrial, consumer and medical products and systems, and their necessesity for the realisation of competetive products in various market segments is growing continously. MST or MEMS is on the way to be a multi-billion ECU world activity. But R&D and production in Microsystem technology (MST) or MEMS, especially the set up of qualified fabrication processes is costly and time consuming.
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© 1998 Springer-Verlag Berlin Heidelberg
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Riethmüller, W., Wenk, B., Dudde, R., Clerc, J.F. (1998). Europractice Competence Center No 1 Microsystems for Automotive Applications and Physical Measurement Systems. In: Ricken, D.E., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 98. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-39696-4_30
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DOI: https://doi.org/10.1007/978-3-662-39696-4_30
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-38795-5
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