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Elemental Analysis by X-Ray and Electron Energy-Loss Spectroscopy

  • Chapter
Transmission Electron Microscopy

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 36))

Abstract

The inner-shell ionization of atoms results in an emission of characteristic x-ray quanta or Auger electrons. A wavelength- or an energy-dispersive x-ray spectrometer can be coupled to a transmission electron microscope to record x-ray quanta emitted from the specimen. The quantitative methods developed for the x-ray microanalysis of bulk materials can be transferred to the investigation of thin specimens.

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  1. Physikalisches Institut, Westfälische Wilhelms-Universität Münster, Wilhelm-Klemm-Strasse 10, D-48149, Münster, Germany

    Professor Dr. Ludwig Reimer

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© 1997 Springer-Verlag Berlin Heidelberg

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Reimer, L. (1997). Elemental Analysis by X-Ray and Electron Energy-Loss Spectroscopy. In: Transmission Electron Microscopy. Springer Series in Optical Sciences, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-14824-2_10

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  • DOI: https://doi.org/10.1007/978-3-662-14824-2_10

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