Skip to main content
SpringerLink
Log in
Book cover

Si Silicon pp 321–362Cite as

Application of Silicon Nitride for Solar Cells

  • Chapter

  • 310 Accesses

Part of the book series: Si. Silicium. Silicon (System-Nr. 15) ((2074,volume S-i / B / 1-5 / 5 / c))

Abstract

Silicon nitride is widely known for its application in integrated circuit technology as encapsulation material, as interlevel insulator for multilevel metallization, as gate dielectric for field effect transistors including memory devices, as a mask for oxidation, diffusion or ion implantation, for selective etching, and as a capping layer for compound semiconductors. Most of these applications are due to the fact that silicon nitride is an excellent diffusion barrier and a gettering and passivating agent regardless how the films are prepared, whether by atmospheric pressure (APCVD), low pressure (LPCVD), or plasma-enhanced (PECVD) chemical vapor deposition, by sputtering, or by electron-beam evaporation, only to mention a few preparation techniques [1 to 3]. PECVD silicon nitride, in the literature often also just named “plasma” silicon nitride, is in many cases just labeled “pd(PD)” silicon nitride throughout this Chapter 32.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   1,459.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Sze, S. M. (VLSI Technology, 2nd Ed., McGraw-Hill, New York 1988, pp. 1/676, 260, 469, 501).

    Google Scholar 

  2. Sze, S. M. (Physics of Semiconductor Devices, 2nd Ed., Wiley, New York 1981, pp. 1/868, 393, 504, 852).

    Google Scholar 

  3. Belyi, V. I.; Vasilyeva, L L; Ginovker, A. S.; Gritsenko, V. A.; Repinsky, S. M.; Sinitsa, S. P.; Smirnova, T. P.; Edelman, F. L. (Mater. Sei. Monogr. 1988 1/263, 34).

    Google Scholar 

  4. Sabisky, W. S.; Stone, J. L. (Conf. Rec. IEEE Photovoltaic Special. Conf. 20 [1988] 39).

    Article  Google Scholar 

  5. Tsuda, S.; Nakamura, N.; Nakashima, Y.; Tarui, H.; Nishiwaki, H.; Ohnishi, M.; Kuwano, Y. (Japan. J. Appl. Phys. 21 Suppl. 2 [1982] 251/7; C.A. 98 [1983] No. 129230).

    Article  CAS  Google Scholar 

  6. Tsuda, S.; Tarui, H.; Ohnishi, M.; Sakai, S.; Uchihashi, K.; Matsuoka, T.; Nakano, S.; Kiyama, S.; Kawata, H.; Kuwano, Y. (J. Non-Cryst. Solids 59/60 [1983] 1135/8).

    Article  Google Scholar 

  7. Kurata, H.; Hirose, M.; Osaka, Y. (Japan. J. Appl. Phys. 20 [1981] L811/L813).

    Article  CAS  Google Scholar 

  8. Wong, B.; Morel, D. L; Grosvenor, V. G. (Tech. Digest 1st Intern. Photovoltaic Sei. Eng. Conf., Kobe, Japan, 1984, pp. 433/6; C.A. 103 [1985] No. 90374).

    Google Scholar 

  9. Chambouleyron, J.; Alvarez, F.; Constantino, C; Cisneros, J. I. (EUR-9007 [1983] 818/21; C.A. 101 [1984] No. 41000).

    Google Scholar 

  10. Hamakawa, Y. (Oyo Butsuri 53 [1982] 863/4 from C.A. 101 [1984] No. 220394).

    Google Scholar 

  11. Stoica, T.; Popescu, C. (EUR-9007 [1983] 832/4; C.A. 101 [1984] No. 41003).

    Google Scholar 

  12. Kuwano, Y.; Tsuda, S.; Nakamura, N.; Nishikuni, M.; Yoshida, Y.; Takahama, T.; Isomura, M.; Nakano, S.; Ohnishi, M. (AIP Conf. Proc. No. 157 [1987] 126/33; C.A. 107 [1987] No. 158242).

    Article  CAS  Google Scholar 

  13. Hasegawa, S.; Segawa, M.; Kurata, Y. (J. Appl. Phys. 64 [1988] 1931/8).

    Article  CAS  Google Scholar 

  14. Hasegawa, S.; Tsukao, T.; Kurata, Y. (Japan. J. Appl. Phys. 25 [1986] L114/L116).

    Article  CAS  Google Scholar 

  15. Hasegawa, S.; Segawa, M; Kurata, Y. (Appl. Phys. Letters 49 [1986] 1178/83).

    Article  CAS  Google Scholar 

  16. Hasegawa, S.; Segawa, M.; Kurata, Y. (Japan. J. Appl. Phys. 25 [1986] L934/L936).

    Article  CAS  Google Scholar 

  17. Yamasaki, S.; Matsuda, A.; Tanaka, K. (Japan. J. Appl. Phys. 21 [1982] L789/L791).

    Article  Google Scholar 

  18. Watanabe, H.; Katoh, K.; Yasni, M.; Shibata, Y. (J. Non-Cryst. Solids 59/60 [1983] 605/8).

    Article  Google Scholar 

  19. Watanabe, H.; Katoh, K.; Yasni, M. (Japan. J. Appl. Phys. 21 [1982] L341/L343).

    Article  Google Scholar 

  20. Matsuda, A.; Matsumura, M.; Yamasaki, S.; Yamamoto, H.; Imura, T.; Okushi, H.; Iizima, S.; Tanaka, K. (Japan. J. Appl. Phys. 20 [1981] L183/L186).

    Google Scholar 

  21. Madan, A. (Eur. Appl. 93514 [1982/83]; C.A. 100 [1984] No. 54598).

    Google Scholar 

  22. Abeles, B.; Tiedje, T. (Phys. Rev. Letters 51 [1983] 2003/6).

    Article  CAS  Google Scholar 

  23. Kakalios, J.; Fritzsche, H.; Ibaraki, N.; Ovshinsky, S. R. (J. Non-Cryst. Solids 66 [1984] 339/44).

    Article  CAS  Google Scholar 

  24. Green, M. A. (Solar Cells, Prentice-Hall, Englewood Cliffs, N.J., 1982, pp. 1/274).

    Google Scholar 

  25. Baraona, C. R.; Brandhorst, H. W. (Conf. Rec. IEEE Photovoltaic Special. Conf. 11 [1975] 1/256, 44/8; C.A. 89 [1978] No. 92276).

    Google Scholar 

  26. Arndt, R. A.; Allison, J. F.; Haynos, J. G.; Meulenberg, A. (Conf. Rec. IEEE Photovoltaic Special. Conf. 11 [1975] 40/3; C.A. 89 [1978] No. 92275).

    CAS  Google Scholar 

  27. Sopori, B. L; Pryor, R. A. (Solar Cells 8 [1983] 249/61; C.A. 98 [1983] No. 218856).

    Article  CAS  Google Scholar 

  28. Sopori, B. L.; Pryor, R. A. (Conf. Rec. IEEE Photovoltaic Special. Conf. 15 [1981] 466/72; C.A. 96 [1982] No. 107127).

    Google Scholar 

  29. Heavens, O. S. (Optical Properties of Thin Solid Films, Dover, New York, 1966, pp. 1/261,46).

    Google Scholar 

  30. Jellison, G. E., Jr.; Wood, R. F. (Solar Cells 18 [1986] 93/114; C.A. 106 [1987] No. 53165).

    Article  CAS  Google Scholar 

  31. Sexton, F. W. (Solar Energy Mater. 7 [1982] 1/14; C.A. 97 [1982] No. 130536).

    Article  CAS  Google Scholar 

  32. Stein, H. J.; Wells, V. A.; Hampy, R. E. (J. Electrochem. Soc. 126 [1979] 1750/4).

    Article  CAS  Google Scholar 

  33. Sinha, A. K.; Levinstein, H.J.; Smith, T. E.; Quintana, G.; Haszko, S. E. (J. Electrochem. Soc. 125 [1978] 601/8).

    Article  CAS  Google Scholar 

  34. Shibata, N. (Japan. J. Appl. Phys. 27 [1988] 480/4).

    Article  CAS  Google Scholar 

  35. Olsen, L. C. (DOE-JPL-956614 [1986] 134 pp.; C.A. 109 [1988] No. 95946).

    Google Scholar 

  36. Philipp, H. R. (EMIS Data Reviews Series No. 4 INSPEC [1988] 1029/36).

    Google Scholar 

  37. Fossum, J. G.; Nasby, R. D.; Burgess, E. L. (Conf. Rec. IEEE Photovoltaic Special. Conf. 13 [1978] 1294/9; C.A. 90 [1979] No. 106887).

    CAS  Google Scholar 

  38. Green, M. A.; Blakers, A. W.; Shi, J.; Keller, E. M.; Wenham, S. R. (Appl. Phys. Letters 44 [1984] 1163/4).

    Article  CAS  Google Scholar 

  39. Stanbery, B. J.; Chen, W. S.; Mickelsen, R. A.; Collins, G. J.; Emery, K. A.; Rocca, J. J.; Thompson, L R. (Solar Cells 14 [1985] 289/91; C.A. 103 [1985] No. 198515).

    Article  CAS  Google Scholar 

  40. Turner, G. W.; Fan, J. C. C; Hsieh, J. J. (Appl. Phys. Letters 37 [1980] 400/2).

    Article  CAS  Google Scholar 

  41. Johnson, C. C; Wydeven, T. (Solar Energy 31 [1983] 355/8; C.A. 99 [1983] No. 125605).

    Article  CAS  Google Scholar 

  42. Tiedje, J. T.; Abeles, B. (Eur. Appl. 173566 [1984/85]; C.A. 105 [1988] No. 53185).

    Google Scholar 

  43. Guo, L; Zhu, C; Liu, E. (Taiyangneng Xuebao [Acta Energiae Solaris Sinica] 7 [1986] 385/93; CA. 106 [1987] No. 123064).

    CAS  Google Scholar 

  44. Ganru, M.; Yuan, X.; Shitin, Z. (Proc. 2nd Photovoltaic Sei. Eng. Conf., Beijing 1986, pp. 234/6).

    Google Scholar 

  45. Yuan, X.; Mao, G.; Guo, W. (Taiyangneng Xuebao [Acta Energiae Solaris Sinica] 8 [1987] 277/81; CA. 108 No. 78635).

    CAS  Google Scholar 

  46. Jia, Q.; Zhu, C; Liu, E. (Proc. 2nd Intern. Photovoltaic Sei. Eng. Conf., Beijing 1986, pp. 223/6).

    Google Scholar 

  47. Green, M. A. (Trans. Tech. Publ. Switzerland 1986 1/300).

    Google Scholar 

  48. Liu, E.; Jia, Q. (Dianzi Kexue Xuekan [J. Electronics] 10 [1988] 285/8; CA. 109 [1988] No. 234119).

    CAS  Google Scholar 

  49. Toshiba Corp.; Toshiba Battery Co., Ltd. (Japan. Kokai Tokkyo Koho 59–150483 [1983/84] from CA. 102 [1985] No. 28471).

    Google Scholar 

  50. King, R. R.; Sinton, R. A.; Swanson, R. M. (Conf. Rec. IEEE Photovoltaic Special. Conf. 19 [1987] 1168/73; CA. 109 [1988] No. 113353).

    Google Scholar 

  51. Arora, J. D.; Singh, S. N.; Mathur, P. C (Solid State Electron. 24 [1981] 739/47; CA. 95 [1981] No. 189998).

    Article  CAS  Google Scholar 

  52. Morita, H.; Sato, A.; Washida, H.; Kato, T.; Onoe, A. (Japan. J. Appl. Phys. 21 Suppl. 2 [1982] 47/51; CA. 98 [1983] No. 146551).

    Article  CAS  Google Scholar 

  53. Green, M. A.; Wenham, S. R.; Blakers, A. W. (Conf. Rec. IEEE Photovoltaic Special. Conf. 19 [1987] 6/12; CA. 109 [1988] No. 131959).

    Google Scholar 

  54. Lanford, W. A.; Rand, M. J. (J. Appl. Phys. 49 [1978] 2473/7).

    Article  CAS  Google Scholar 

  55. Hezel, R.; Jaeger, K. (J. Electrochem. Soc. 136 [1989] 518/23).

    Article  CAS  Google Scholar 

  56. Kato, T.; Morita, H.; Sato, A.; Washida, H.; Onoe, A.; Fujimoto, F.; Komaki, K.; Ootuka, A.; Iwata, Y. (Proc. Electrochem. Soc. 83–11 [1983] 255/65; CA. 99 [1983] No. 161457).

    CAS  Google Scholar 

  57. Shirasawa, K.; Okada, K.; Fukui, K.; Hirose, M.; Yamashita, H.; Watanabe, H. (Proc. 3rd Photovoltaic Sei. Eng. Conf., Tokyo 1987, pp. 97/100).

    Google Scholar 

  58. Kimura, K. (Tech. Digest 1st Intern. Photovoltaic Sei. Eng. Conf., Kobe, Japan, 1984, pp. 37/42; CA. 103 [1985] No. 90340).

    Google Scholar 

  59. Shirasawa, K.; Yamashita, H.; Fukui, K.; Takayama, M.; Okada, K.; Masuri, K.; Watanabe, H. (Conf. Rec. IEEE Photovoltaic Special. Conf. 21 [1990] 668/73).

    Article  Google Scholar 

  60. Green, M. A.; Blakers, A. W.; Wenham, S. R. (Proc. 9th E.C Photovoltaic Solar Energy Conf., Freiburg 1989, pp. 301/4).

    Google Scholar 

  61. Hezel, R.; Jaeger, K. (Proc. 2nd Intern. Photovoltaic Sei. Eng. Conf., Beijing 1986, pp. 230/3).

    Google Scholar 

  62. Jaeger, K.; Hezel, R. (Conf. Rec. IEEE Photovoltaic Special. Conf. 19 [1987] 388/91; CA. 109 [1988] No. 58143).

    Google Scholar 

  63. Hezel, R.; Jaeger, K. (Conf. Rec. IEEE Photovoltaic Special. Conf. 20 [1988] 1560/4).

    Article  Google Scholar 

  64. Pulfrey, D. L. (IEEE Trans. Electron Devices ED-25 [1978] 1308/17; CA. 90 [1979] No. 41 238).

    Article  CAS  Google Scholar 

  65. Godfrey, R. G.; Green, M. A. (Appl. Phys. Letters 34 [1979] 860/1).

    Article  CAS  Google Scholar 

  66. Myszkowski, A.; Sansores, L. E.; Taguena-Martinez, J. (Conf. Rec. IEEE Photovoltaic Special. Conf. 15 [1981] 1294/301; CA. 96 [1982] No. 146041).

    Google Scholar 

  67. Charlson, E. J.; Richardson, W. F. (Conf. Rec. IEEE Photovoltaic Special. Conf. 13 [1978] 656/60; CA. 91 [1979] No. 178046).

    CAS  Google Scholar 

  68. Hezel, R.; Meisel, T.; Streb, W. (J. Appl. Phys. 56 [1984] 1756/61).

    Article  CAS  Google Scholar 

  69. Liu, E.; Jia, Q.; Liu, X.; Sun, Y.; Zhang, S. (Conf. Rec. IEEE Photovoltaic Special. Conf. 19 [1987] 382/7; CA. 109 [1988] No. 131994).

    Google Scholar 

  70. Salter, G. C; Thomas, R. E. (Solid State Electron. 20 [1977] 95/104; C.A. 86 [1977] No. 142883).

    Article  CAS  Google Scholar 

  71. Hezel, R. (Solid State Electron. 24 [1981] 863/8; C.A. 95 [1981] No. 222828).

    Article  CAS  Google Scholar 

  72. Hezel, R.; Schörner, R. (J. Appl. Phys. 52 [1981] 3076/9).

    Article  CAS  Google Scholar 

  73. Hezel, R. (Conf. Rec. IEEE Photovoltaic Special. Conf. 16 [1982] 1237/42; C.A. 103 [1985] No. 8911).

    Google Scholar 

  74. Hezel, R. (Conf. Rec. IEEE Photovoltaic Special. Conf. 18 [1985] 180/5; C.A. 105 [1986] No. 229825).

    Google Scholar 

  75. Jaeger, K.; Hezel, R. (IEEE Trans. Electron. Devices ED-32 [1985] 1824/9; C.A. 103 [1985] No. 180914).

    Article  CAS  Google Scholar 

  76. Hezel, R. (Springer Ser. Electrophys. 7 [1981] 219/23; C.A. 96 [1982] No. 9402).

    Google Scholar 

  77. Frohmann-Bentchkowsky, D.; Lenzlinger, M. (J. Appl. Phys. 40 [1969] 3307/19).

    Article  Google Scholar 

  78. Hezel, R.; Blumenstock, K.; Schörner, R. (J. Electrochem. Soc. 131 [1984] 1679/83).

    Article  CAS  Google Scholar 

  79. Goetzberger, A.; Heine, V.; Nicollian, E. H. (Appl. Phys. Letters 12 [1968] 95/7).

    Article  CAS  Google Scholar 

  80. Hezel, R.; Jaeger, K. (Solid State Electron. 26 [1983] 993/7; C.A. 99 [1983] No. 198005).

    Article  CAS  Google Scholar 

  81. Sun, S. C; Rummer, J. D. (IEEE J. Solid State Circuits SC-15 [1980] 562/73; C.A. 93 [1980] No. 229217, see also: IEEE Trans. Electron Devices ED-27 [1980] 1497/508; C.A. 93 [1980] No. 196079).

    Article  CAS  Google Scholar 

  82. Wang, H.; Liu, E.; Zhang, S. (Taiyangneng Xuebao [Acta Energiae Solaris Sinica] 8 [1987] 28/35; C.A. 107 [1987] No. 61942).

    CAS  Google Scholar 

  83. Hezel, R.; Hu, L; Jaeger, K. (Proc. 4th Intern. Photovoltaic Sei. Eng. Conf., Sydney 1989, pp. 707/12).

    Google Scholar 

  84. Hezel, R. (Conf. Rec. IEEE Photovoltaic Special. Conf. 21 [1990] 239/44).

    Article  Google Scholar 

  85. Bauch, W.; Jaeger, K.; Hezel, R. (Appl. Surf. Sei. 39 [1989] 356/63; C.A. 112 [1990] No. 46705).

    Article  CAS  Google Scholar 

  86. Goetzberger, A.; Klausmann, E.; Schulz, M. J. (CRC Crit. Rev. Solid State Sei. 6 No. 1 [1976] 1/43; C.A. 84 [1976] No. 188031).

    Article  Google Scholar 

  87. Gruenbaum, P. E.; Sinton, P. A.; Swanson, R. M. (Appl. Phys. Letters 52 [1988] 1407/9).

    Article  CAS  Google Scholar 

  88. Bauch, W.; Hezel, R. (Proc. 9th E. C. Photovoltaic Solar Energy Conf., Freiburg 1989, pp. 390/3).

    Google Scholar 

  89. Cheng, Y.; Mao, G.; Guo, W. (Taiyangneng Xuebao [Acta Energiae Solaris Sinica] 9 [1988] 196/204; C.A. 109 [1988] No. 234118).

    CAS  Google Scholar 

  90. Hoffmann, W.; Jaeger, K.; Hezel, R. (Proc. 4th Intern. Photovoltaic Sei. Eng. Conf., Sydney 1989, pp. 725/30).

    Google Scholar 

  91. Hoffmann, W.; Jaeger, K.; Luthardt, G.; Hezel, R. (Proc. 9th E. C. Photovoltaic Solar Energy Conf., Freiburg 1989, pp. 677/9).

    Google Scholar 

  92. Liu, X.; Jia, Q.; Liu, E. (Solar Energy Mater. 17 [1988] 257/63; C.A. 109 [1988] No. 25227).

    Article  CAS  Google Scholar 

  93. Liu, X.; Liu, E.; Jia, Q. (Taiyangneng Xuebao [Acta Energiae Solaris Sinica] 9 [1988] 128/33; C.A. 109 [1988] No. 234116).

    CAS  Google Scholar 

  94. Hezel, R. (Tech. Digest 1st Intern. Photovoltaic Sei. Eng. Conf., Kobe, Japan, 1984, pp. 145/8; C.A. 103 [1985] No. 73817).

    Google Scholar 

  95. Schörner, R.; Hezel, R. (IEEE Trans. Electron. Devices ED-28 [1981] 1466/9; C.A. 96 [1982] No. 220507).

    Article  Google Scholar 

  96. Kirpatenko, L. T.; Shmyreva, A. N. (Geliotekhnika 22 No. 3 [1986] 13/7; C.A. 105 [1986] No. 118094).

    Google Scholar 

  97. Burte, E. P.; Hezel, R. (J. Appl. Phys. 55 [1984] 1183/7).

    Article  CAS  Google Scholar 

  98. Hokuyo, S. (Ger. Offen. 3819671 [1987/89]; C.A. 110 [1989] No. 196392).

    Google Scholar 

  99. Turner, G. W.; Connors, M. K. (J. Electrochem. Soc. 131 [1984] 1211/3).

    Article  CAS  Google Scholar 

  100. Mitsui, K.; Yoshida, S.; Oda, T.; Yukimoto, Y.; Shirahata, K. (Japan. J. Appl. Phys. 20 Suppl. 2 [1980] 99/103; CA. 96 [1982] No. 220518).

    Google Scholar 

  101. Tekeuchi, Y.; Mori, M.; Maekawa, K.; Nishizawa, T. (Ger. Offen. 3334316 [1982/84]; CA. 101 [1984] No. 26194).

    Google Scholar 

  102. Surek, T.; Ariotedjo, A. P.; Cheek, G. C; Hardy, R. W.; Milstein, J. B.; Tsuo, Y. S. (Conf. Rec. IEEE Photovoltaic Special. Conf. 15 [1981] 1251/60; CA. 96 [1982] No. 88407).

    Google Scholar 

  103. Goetzberger, A.; Räuber, A. (Conf. Rec. IEEE Photovoltaic Special. Conf. 20 [1988] 1371/4).

    Article  Google Scholar 

  104. Hide, J.; Yokoyama, T.; Matsuyama, T.; Suzuki, M.; Maeda, Y. (Conf. Rec. IEEE Photovoltaic Special. Conf. 20 [1988] 1400/4).

    Article  Google Scholar 

  105. Yokoyama, T.; Hide, J.; Sawaya, T.; Matsuyama, T.; Maeda, Y. (Conf. Rec. IEEE Photovoltaic Special. Conf. 15 [1985] 1074/7; CA. 105 [1986] No. 211 759).

    Google Scholar 

  106. Putney, Z. C; Regnault, W. F. (Eur. 73938 [1981/83]; CA. 98 [1983] No. 225777).

    Google Scholar 

  107. Schwirtlich, J.; Woditsch, P. (Ger. Appl. 3419137 [1984/85]; CA. 104 [1986] No. 60606).

    Google Scholar 

  108. Saito, T.; Shimura, A.; Ichikawa, S. (Japan. J. Appl. Phys. 21 Suppl. 2 [1982] 35/8; CA. 98 [1983] No. 146548).

    CAS  Google Scholar 

  109. Sedgwick, T. O.; Geiss, R. H.; Depp, S. W.; Hanchett, V. E.; Huth, B. G.; Graf, V.; Silvestri, V. J. (J. Electrochem. Soc. 129 [1982] 2802/8).

    Article  CAS  Google Scholar 

  110. Kondo, S.; Mizutani, H. (Eur. Appl. 276961 [1987/88]; CA. 109 [1988] No. 153115).

    Google Scholar 

  111. Semiconductor Energy Res. Inst. Co., Ltd. (Japan. Kokai Tokkyo Koho 57–160176 [1981/82] from CA. 98 [1983] No. 92695).

    Google Scholar 

  112. Semiconductor Energy Res. Inst. Co., Ltd. (Japan. Kokai Tokkyo Koho 57–160175 [1981/82] from CA. 98 [1983] No. 92696).

    Google Scholar 

  113. Sanyo Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 59–61078 [1982/84] from CA. 101 [1984] No. 134105).

    Google Scholar 

  114. Toshiba Corp. (Japan. Kokai Tokkyo Koho 58–151070 [1982/83] from CA. 100 [1984] No. 37133).

    Google Scholar 

  115. Semiconductor Energy Res. Inst. Co., Ltd. (Japan. Kokai Tokkyo Koho 57–130482 [1981/82] from CA. 98 [1983] No. 45310).

    Google Scholar 

  116. Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 58–48476 [1981/83] from CA. 99 [1983] No. 56521).

    Google Scholar 

  117. Sharp Corp. (Japan. Kokai Tokkyo Koho 60–35553 [1985] from CA. 103 [1985] No. 39902).

    Google Scholar 

  118. Toshiba Corp. (Japan. Kokai Tokkyo Koho 60–28277 [1985] from CA. 103 [1985] No. 24992).

    Google Scholar 

  119. Nippondenso Co., Ltd. (Japan. Kokai Tokkyo Koho 59–184574 [1983/84] from CA. 102 [1985] No. 152214).

    Google Scholar 

  120. Japan Solar Energy K. K. (Japan. Kokai Tokkyo Koho 58–220477 [1982/83] from CA. 100 [1984] No. 159543).

    Google Scholar 

  121. Matsushita Electric Works, Ltd. (Japan. Kokai Tokkyo Koho 59–158572 [1983/84] from CA. 102 [1985] No. 64955).

    Google Scholar 

  122. Toshiba Corp.; Toshiba Battery Co., Ltd. (Japan. Kokai Tokkyo Koho 59–150483 [1983/84] from CA. 102 [1985] No. 28471).

    Google Scholar 

  123. Agency of Industrial Sciences and Technology (Japan. Kokai Tokkyo Koho 59–112660 [1982/84] from CA. 101 [1984] No. 214042).

    Google Scholar 

  124. Nippon Telegraph and Telephone Public Corp. (Japan. Kokai Tokkyo Koho 57–23277 [1980/82] from CA. 96 [1982] No. 209301).

    Google Scholar 

  125. Ito, T. (Japan. Kokai Tokkyo Koho 55–1133 [1978/80] from C.A. 92 [1980] No. 183686).

    Google Scholar 

  126. Nippon Telegraph and Telephone Public Corp. (Japan. Kokai Tokkyo Koho 59–232477 [1983/84] from C.A. 103 [1985] No. 15579).

    Google Scholar 

  127. Fuji Electric Research Laboratory (Japan. Kokai Tokkyo Koho 59–55080 [1982/84] from C.A. 101 [1984] No. 82671).

    Google Scholar 

  128. Semiconductor Energy Res. Inst. Co., Ltd. (Japan. Kokai Tokkyo Koho 58–164221 [1982/83] from C.A. 99 [1983] No. 223617).

    Google Scholar 

  129. Semiconductor Energy Res. Inst. Co., Ltd. (Japan. Kokai Tokkyo Koho 57–67009 [1980/82] from C.A. 97 [1982] No. 95547).

    Google Scholar 

  130. Hitachi Ltd. (Japan. Kokai Tokkyo Koho 60–5510 [1985] from C.A. 103 [1985] No. 31175).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Universität Frankfurt/Main, Germany

    Eberhard F. Krimmel

  2. Universität Erlangen, Nürnberg, Germany

    Rudolf Hezel

  3. Gmelin Institute, Frankfurt/Main, Germany

    Uwe Nohl & Rainer Bohrer

Authors
  1. Eberhard F. Krimmel
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Rudolf Hezel
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Uwe Nohl
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Rainer Bohrer
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Gmelin Institute, Frankfurt/Main, Germany

    Alfred Pebler  & Friedrich Schröder  & 

Rights and permissions

Reprints and permissions

Copyright information

© 1991 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Krimmel, E.F., Hezel, R., Nohl, U., Bohrer, R. (1991). Application of Silicon Nitride for Solar Cells. In: Pebler, A., Schröder, F. (eds) Si Silicon. Si. Silicium. Silicon (System-Nr. 15), vol S-i / B / 1-5 / 5 / c. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09901-8_32

Download citation

  • DOI: https://doi.org/10.1007/978-3-662-09901-8_32

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-09903-2

  • Online ISBN: 978-3-662-09901-8

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation