Abstract
The present chapter focuses on the electrical characterization of small ferroelectric capacitors and the problems arising from going to smaller and smaller structure sizes. In particular, the electrical hysteresis loop is investigated as a key property of ferroelectric materials.
Keywords
- Hysteresis Loop
- Bottom Electrode
- Parasitic Capacitance
- Electrical Characterization
- Atomic Force Microscope Cantilever
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Tiedke, S., Schmitz, T. (2004). Electrical Characterization of Nanoscale Ferroelectric Structures. In: Alexe, M., Gruverman, A. (eds) Nanoscale Characterisation of Ferroelectric Materials. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-08901-9_3
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DOI: https://doi.org/10.1007/978-3-662-08901-9_3
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-05844-8
Online ISBN: 978-3-662-08901-9
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