Abstract
In a first part of this paper, we survey the conceptional and methodological background of the stochastic field equations approach to model surface growth processes. In the second part, we focus on recent progress in the modeling of such equations for the specific case of vapor deposited amorphous thin films that allow for a quantitative validation with experimental data.
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Linz, S.J., Raible, M., Hänggi, P. (2003). Morphogenesis of Growing Amorphous Films. In: Emmerich, H., Nestler, B., Schreckenberg, M. (eds) Interface and Transport Dynamics. Lecture Notes in Computational Science and Engineering, vol 32. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-07969-0_9
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DOI: https://doi.org/10.1007/978-3-662-07969-0_9
Publisher Name: Springer, Berlin, Heidelberg
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