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Thermodynamic Aspects

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Epitaxy

Part of the book series: Springer Series in MATERIALS SCIENCE ((SSMATERIALS,volume 62))

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Abstract

There are, in general, four basic conceptual tools required for a formal description of epitaxy. These are:

  1. (i)

    thermodynamics of phase transitions and interface formation [11.1–3]

  2. (ii)

    fluid dynamics (hydro-, and gasodynamics) of mass transport [11.4–6]

  3. (iii)

    statistical mechanics of crystal growth processes [11.7], including the kinetics of surface migration/diffusion and ordering processes [11.8], and

  4. (iv)

    quantum mechanics of chemical bond formation (chemisorption and lattice incorporation) [11.9]

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Herman, M.A., Richter, W., Sitter, H. (2004). Thermodynamic Aspects. In: Epitaxy. Springer Series in MATERIALS SCIENCE, vol 62. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-07064-2_11

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