Abstract
The large number of applications of thin films based on polymerized hydrocarbons has led to many methods for producing this kind of film. These deposition technologies can be classified in different ways:
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© 2003 Springer-Verlag Berlin Heidelberg
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Heilmann, A. (2003). Film Deposition. In: Polymer Films with Embedded Metal Nanoparticles. Springer Series in Materials Science, vol 52. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-05233-4_2
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DOI: https://doi.org/10.1007/978-3-662-05233-4_2
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-07729-6
Online ISBN: 978-3-662-05233-4
eBook Packages: Springer Book Archive