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Advanced Transport Modelling in a Microelectronics Company: Status and Perspectives

  • C. Bergonzoni
  • A. Benvenuti
  • A. Marmiroli
Part of the Mathematics in Industry book series (MATHINDUSTRY, volume 1)

Abstract

The currently used TCAD transport modelling tools for semiconductor device simulation are reviewed, with particular emphasis on the performance and reliability issues relating to CMOS and non volatile memory devices. The different methods for approximating the solution of the Boltzmann transport equation (BTE) are compared, and their suitability for the high energy transport regime simulation is analyzed. Examples of the application of device simulations to the study the hot carrier reliability of CMOS transistors and charge carriers injection in non-volatile memory cell programming cycles are shown. The importance of proper definition and adaptation of the discretization grid is pointed out, and the implications of quantum effects in state-of-the-art deep submicron devices are discussed.

Keywords

Gate Insulator Boltzmann Transport Equation Internal Electric Field Floating Gate CMOS Transistor 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2002

Authors and Affiliations

  • C. Bergonzoni
    • 1
  • A. Benvenuti
    • 1
  • A. Marmiroli
    • 1
  1. 1.ST MICROELECTRONICSCENTRAL R & DAgrate Brianza (MI)Italy

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