Abstract
Laser direct writing by pyrolytic or photolytic decomposition of gas-phase precursors permits single-step surface patterning of planar and non-planar substrates. The process can most easily be studied by translating the substrate in one dimension perpendicular to the focused laser beam. By this means one obtains stripes (lines). The literature on such investigations is included in Appendix B.4.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2000 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Bäuerle, D. (2000). Direct Writing. In: Laser Processing and Chemistry. Advanced Texts in Physics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-04074-4_18
Download citation
DOI: https://doi.org/10.1007/978-3-662-04074-4_18
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-08614-4
Online ISBN: 978-3-662-04074-4
eBook Packages: Springer Book Archive