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Low Energy Ion Scattering

  • Chapter
Surface Analysis Methods in Materials Science

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 23))

Abstract

Low energy ion scattering (LEIS) is the study of the structure and composition of a surface by the detection of low energy (100 eV–10 keV) ions (and atoms) elastically scattered off the surface. This technique is a subset of ion scattering spectrometry which involves the use of incident ions with energies ranging from 200 eV to over 1 MeV. The range of measurements possible over such a large range of energies extends from purely atomic layer resolution at the low energy end to analysis to depths of the order of microns at the high energy end. Some of the high energy effects (> 250 keV) are covered in Chap. 9, while the intermediate energy range (medium energy ion scattering) has been successfully developed as a near surface structure probe mentioned briefly in Chap. 1. The use of low energy ions to measure the surface structure of solids was established by Smith [11.1] in 1968. In that study the basic elements of LEIS were established and these have been built on over the past 20 years to develop into a powerful surface atomic layer structure and composition probe. It has been successfully applied to a wide range of practical surface problems which include the surface composition analysis of:

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Authors
  1. D. J. O’Connor
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Editors and Affiliations

  1. Department of Physics, Newcastle University, Callaghan, 2308, Newcastle, NSW, Australia

    D. John O’Connor

  2. CSIRO Division of Materials Science and Technology, Locked Bag 33, 3168, Clayton, Victoria, Australia

    Brett A. Sexton

  3. South Australian Surface Technology Centre, University of South Australia, The Levels, 5095, Adelaide, South Australia, Australia

    Roger St. C. Smart

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© 1992 Springer-Verlag Berlin Heidelberg

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O’Connor, D.J. (1992). Low Energy Ion Scattering. In: O’Connor, D.J., Sexton, B.A., Smart, R.S.C. (eds) Surface Analysis Methods in Materials Science. Springer Series in Surface Sciences, vol 23. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-02767-7_11

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  • DOI: https://doi.org/10.1007/978-3-662-02767-7_11

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-02769-1

  • Online ISBN: 978-3-662-02767-7

  • eBook Packages: Springer Book Archive

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