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Real-Time Configuration Techniques for PnP Performance Optimization

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Abstract

In Chapter 5, based on the proposed PnP-PMCA, the PnP process monitoring module has been discussed. Parallel to the previous chapter, in this chapter, the study on the PnP process control module in CL is expressed.

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Copyright information

© Springer Fachmedien Wiesbaden GmbH 2017

Authors and Affiliations

  1. 1.Universität Duisburg-EssenDuisburgGermany

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