Abstract
Recently Low-Temperature Scanning Electron Microscopy (LTSEM) has been shown to represent a powerful tool for investigating deviations from spatial homogeneity in superconducting thin films and thin-film devices. The particular importance of LTSEM lies in the fact that it probes directly the functional electronic behavior of the superconducting thin-film configuration with high spatial resolution. Such a spatially resolving functional test becomes imperative for the understanding of the physical behavior of superconducting thin-film devices and for identifying the possible origins of abnormal device behavior. In the future LTSEM can be expected to assume a growing role in the quality control of cryoelectronic devices.
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Huebener, R.P. (1989). Low-Temperature Scanning Electron Microscopy of Superconducting Thin Films and Tunnel Junctions. In: Kose, V. (eds) Superconducting Quantum Electronics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-95592-1_8
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DOI: https://doi.org/10.1007/978-3-642-95592-1_8
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