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SEM-EBIC Investigations of the Electrical Activity of Grain Boundaries in Germanium

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Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 35))

Abstract

The electrical activity of various grain boundaries (GBs) including subgrains and highly misorientated GBs, has been studied using the EBIC-mode of a scanning electron microscope. The crystallography of the defects has been characterized from electron channeling patterns (ECP) and X-ray topographs. The electrical behaviour of GBs has been found strongly affected by impurity segregation. Bright EBIC contrast observed at some GBs after annealing has been related to the degradation of the diffusion length of holes in the adjacent grains. EBIC observations performed at low temperature revealed the presence of a trapping process of the holes on a near-valence band level.

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© 1989 Springer-Verlag Berlin, Heidelberg

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Tabet, N., Monty, C., Marfaing, Y. (1989). SEM-EBIC Investigations of the Electrical Activity of Grain Boundaries in Germanium. In: Möller, H.J., Strunk, H.P., Werner, J.H. (eds) Polycrystalline Semiconductors. Springer Proceedings in Physics, vol 35. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-93413-1_12

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  • DOI: https://doi.org/10.1007/978-3-642-93413-1_12

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-93415-5

  • Online ISBN: 978-3-642-93413-1

  • eBook Packages: Springer Book Archive

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