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Secondary Ion Mass Spectrometry SIMS III pp 49–51Cite as

Simple Double-Channel SIMS Instrument

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Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 19))

Abstract

Secondary ion mass spectrometers serve currently as rather efficient tools for elemental and isotopic analysis of thin films, diffusion layers and other solids complex in composition and structure. Using a mass analyzer of the monopole type we have designed a compact double-channel secondary ion mass spectrometer. The objective was to produce simple, economical and technologically feasible ion optics with enhanced reliability of power supplies.

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Author information

Authors and Affiliations

  1. Institute of Metal Physics, Academy of Sciences of the UkrSSR, Kiev 142, USSR

    V. T. Cherepin, I. N. Dubinsky & Ya. Ya. Dyad’kin

Authors
  1. V. T. Cherepin
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  2. I. N. Dubinsky
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  3. Ya. Ya. Dyad’kin
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, D-4400, Münster, Fed. Rep. of Germany

    A. Benninghoven

  2. Physical Institute of the Technical University, H-1111, Budapest, Hungary

    J. Giber  & J. László  & 

  3. Department of Physical Chemistry and Radiology, Eötvös University, H-1111, Budapest, Hungary

    M. Riedel

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1982 Springer-Verlag Berlin Heidelberg

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Cite this paper

Cherepin, V.T., Dubinsky, I.N., Dyad’kin, Y.Y. (1982). Simple Double-Channel SIMS Instrument. In: Benninghoven, A., Giber, J., László, J., Riedel, M., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS III. Springer Series in Chemical Physics, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-88152-7_6

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  • DOI: https://doi.org/10.1007/978-3-642-88152-7_6

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-88154-1

  • Online ISBN: 978-3-642-88152-7

  • eBook Packages: Springer Book Archive

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