Modification of the MISR Method with the Use of Implantation of Standard Elements

Abstract

The most accurate calibrational method for SIMS to date is that of the matrix ion species ratio indexed sensitivity factors (MISR) [1,2]. In this method the RSF’s are recorded against the relative secondary yields of two clusters or multiple charged atomic ions of the matrix species which characterize better the reactive gas surface concentration than the partial pressure of the reactive gas in the vacuum chamber [3]. The greatest problem in the practice of the calibrational methods is the selection of the most suitable standard sample with a close match to the one to be measured [4]. It has been demonstrated that ion implantation techniques may be used to incorporate a known amount of almost any element into the subsurface region of the sample [5], therefore LETA and MORRISON have proposed the application of ion implantation for the fabrication of internal standards in the sample itself [6].