Abstract
The understanding of the formation process of sputtered oxide molecules, in particular of MeO (Me: metal), is important for a number of reasons, such as
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an increased insight in surface processes induced by ion bombardment,
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oxidation studies at solid surfaces by mass spectrometric methods like SIMS or SNMS (Sputtered Neutral Mass Spectrometry [1]),
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the enhancement of secondary ion yields by oxygen exposure or bombardment
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the great fraction of MeO in the flux of oxide specific sputtered particles consisting mainly of neutrals also for oxides.
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References
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© 1982 Springer-Verlag Berlin Heidelberg
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Oechsner, H. (1982). Molecule Formation in Oxide Sputtering. In: Benninghoven, A., Giber, J., László, J., Riedel, M., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS III. Springer Series in Chemical Physics, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-88152-7_18
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DOI: https://doi.org/10.1007/978-3-642-88152-7_18
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