Improvements and Applications of the Riber MIQ 156
The techniques of in depth profile analysis have been improved considerably during the last few years. These methods include secondary ion mass spectrometry (SIMS) and surface analysis techniques combined with sputtering such as Auger electron spectroscopy (AES), electron spectroscopy for chemical analysis (ESCA) etc. We have put the emphasis on our equipment combining the three analytical methods mentioned above (LAS 3000): because comparison of the techniques indicates that, although unique in regard to certain applications, they all suffer from limitation regarding their general applicability in surface layer analysis. However a new ion gun has been designed  for the SIMS equipment because new needs have appeared, among these are a shorter time of analysis, a higher sensibility and an improvement in the dynamic range in depth profile.
KeywordsArsenic Boron Auger
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- 1.H. Liebl, Max Plancklnstitut Garching, BRD Patent PendingGoogle Scholar