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Local Laser- Induced Heat Treatment

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Laser-Assisted Microtechnology

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 19))

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Abstract

The laser is a useful tool for the heat treatment in microtechnology mainly for two reasons: Firstly, the beam can be focussed onto a small area thus allowing local heating of very tiny parts. Secondly, heating rates of up to 108 K/s can be achieved for periods from a few nanoseconds to hundreds of milliseconds. This allows the precise control of thermally-induced structural modifications of material only in the zone under treatment, without affecting the unirradiated areas.

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  1. BIAS Bremen Institute of Applied Beam Technology, Klagenfurter Str. 2, D-28359, Bremen, Germany

    Professor Dr. Simeon M. Metev

  2. IFMO Institute of Fine Mechanics and Optics, Sablinskaya 14, 197101, St. Petersburg, Russia

    Professor Dr. Vadim P. Veiko

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Metev, S.M., Veiko, V.P. (1998). Local Laser- Induced Heat Treatment. In: Laser-Assisted Microtechnology. Springer Series in Materials Science, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-87271-6_4

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