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Positional Correction During Laser Cutting by Means of Digital Image Processing

  • P. Schlüter
Conference paper

Abstract

Solid-state lasers are tools used for high-precision material processing. The accuracy to which these lasers are now capable of cutting and welding calls for positionally correct and accurate workpiece feed. The feed accuracy requirement, e.g. +/− 0,1 mm, cannot always be satisfied because the tolerances are too high. Digital image processing enables the position of the workpiece to be detected prior to processing. To establish the deviations, a setpoint/actual-value comparison is performed, whereafter the correction data are calculated and transferred to the control unit. The use of positional correction during laser cutting is illustrated by means of an example from the manufacturing of semiconductors.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • P. Schlüter

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