Skip to main content
SpringerLink
Log in

Formation and Properties of Metal—Semiconductor Interfaces

  • Chapter
Electronic Materials

Part of the book series: Springer Series in Solid-State Sciences ((SSSOL,volume 95))

Abstract

The properties of interfaces formed by the deposition of metal atoms onto semiconductor surfaces have been studied extensively. The development of experimental techniques that allow investigations with high spatial and energy resolution has advanced the understanding of surface bonding, chemical reactions, intermixing, and Schottky barrier formation [8.1–26]. At the same time, our understanding of the processes and the mechanisms that give rise to the various atom profiles is still far from complete. Moreover, there is no consensus about the physical mechanisms responsible for the development of the Schottky barrier.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. A great many important contributions have come from the application of the tools of surface science for interface research, including those listed below. Here, we emphasize references related to photoemission. Others would include scanning tunneling microscopy, LEED, medium-energy ion scattering, Rutherford backscattering, etc. See, for example: J.M. Poate, K.N. Tu, J.W. Mayer (eds.): Thin Films - Interdiffusion and Reaction (Wiley Interscience, New York 1978)

    Google Scholar 

  2. L.C. Feldman, J.W. Mayer (eds.): Fundamentals of Surface and Thin Film Analysis (North- Holland, New York 1986)

    Google Scholar 

  3. W.E. Spicer, Z. Liliental-Weber, E. Weber, N. Newman, T. Kendelewicz, R. Cao, C. McCants, P. Mahowald, K. Miyano, I. Lindau: J. Vac. Sci. Technol. B 6, 1245 (1988)

    Article  CAS  Google Scholar 

  4. For a detailed discussion see: W.E. Spicer, R. Cao, K. Miyano: In Metallization and Metal- Semiconductor Interfaces, NATO Advanced Study Institute, Series B, Physics, Vol. 195, ed. by I.P. Batra (Plenum, New York 1989) and references therein

    Google Scholar 

  5. Z. Liliental-Weber: J. Vac. Sci. Technol. B 5, 1007 (1987)

    Article  CAS  Google Scholar 

  6. LJ. Brillson: Surf. Sci. Rep. 2, 123 (1982) and references therein

    Article  CAS  Google Scholar 

  7. R.E. Viturro, J.L. Shaw, C. Mailhiot, LJ. Brillson, N. Tache, J. McKinlay, G. Margaritondo: Appl. Phys. Lett. 52, 2052 (1988)

    Article  CAS  Google Scholar 

  8. LJ. Brillson et al.: J. Vac. Sci. Technol. B 6, 1263 (1988)

    Article  CAS  Google Scholar 

  9. J.R. Waldrop, S.P. Kowalczyk, R.W. Grant: J. Vac. Sci. Technol. 21, 607 (1982)

    Article  CAS  Google Scholar 

  10. J.H. Weaver: in Analysis and Characterization of Thin Films, ed. by K.N. Tu, R. Rosenberg (Academic, New York 1987)

    Google Scholar 

  11. E.H. Rhoderick, R.H. Williams: Metal-Semiconductor Contacts, 2nd ed. (Clarendon, Oxford 1988)

    Google Scholar 

  12. R. Ludeke: Surf. Sci. 168, 290 (1986)

    Article  CAS  Google Scholar 

  13. G. LeLay: Surf. Sci. 132, 169 (1983)

    Article  CAS  Google Scholar 

  14. G.W. Rubloff: Surf. Sci. 132, 268 (1983)

    Article  CAS  Google Scholar 

  15. M. Prietsch, M. Domke, C. Laubschat, G. Kaindl: Phys. Rev. Lett. 60, 436 (1988)

    Article  CAS  Google Scholar 

  16. C. Laubschat, M. Prietsch, M. Domke, E. Weschke, G. Remmers, T. Mandel, J.E. Ortega, G. Kaindl: Phys. Rev. Lett. 62, 1306 (1989)

    Article  CAS  Google Scholar 

  17. K. Stiles, A. Kahn: Phys. Rev. Lett. 60, 440 (1988)

    Article  CAS  Google Scholar 

  18. K. Stiles, A. Kahn, D.G. Kilday, G. Margaritondo: J. Vac. Sci. Technol. B 5, 987 (1987)

    Article  CAS  Google Scholar 

  19. K. Stiles, S.F. Horng, A. Kahn, J. McKinley, D.G. Kilday, G. Margaritondo: J. Vac. Sci. Technol. B 6, 1392 (1988) and references therein

    Article  CAS  Google Scholar 

  20. W. Mönch: Phys. Rev. Lett. 58, 1260 (1987)

    Article  Google Scholar 

  21. K.L.I. Kobayashi, N. Watanabe, T. Narasawa, H. Nakashima: J. Appl. Phys. 58, 3758 (1985)

    Article  CAS  Google Scholar 

  22. N. Watanabe, K.L.I. Kobayashi, T. Narasawa, H. Nakashima: J. Appl. Phys. 58, 3766 (1985)

    Article  CAS  Google Scholar 

  23. J.L. Freeouf, J.W. Woodall: Appl. Phys. Lett. 39, 727 (1981)

    Article  CAS  Google Scholar 

  24. C.M. Aldao, I.M. Vitomirov, G.D. Waddill, S.G. Anderson, J.H. Weaver: Phys. Rev. B 41, 2800 (1990) and references therein

    Article  CAS  Google Scholar 

  25. J.H. Weaver, Zhangda Lin, F. Xu: “Surface Segregation at Evolving Metal-Semiconductor Interfaces”, in Surface Segregation and Related Phenomena, ed. by P.A. Dowben, A. Miller (CRC Press, Boca Raton, FL 1990) Chap. 10, and references therein

    Google Scholar 

  26. R.M. Feenstra, P. Mårtensson: Phys. Rev. Lett. 61, 447 (1988)

    Article  CAS  Google Scholar 

  27. P.N. First, J.A. Stroscio, R.A. Dragoset, D.T. Pierce, RJ. Celotta: Phys. Rev. Lett. 63, 1416 (1989)

    Article  CAS  Google Scholar 

  28. E.E. Koch, D.E. Eastman, Y. Farge: Handbook on Synchrotron Radiation (North-Holland, New York 1983)

    Google Scholar 

  29. H. Winick, S. Doniach (eds.): Synchrotron Radiation Research (Plenum, New York 1980)

    Google Scholar 

  30. G. Margaritondo, J.H. Weaver: “Photoemission Studies of Valence States” in Methods in Experimental Physics and Surfaces, ed. by M. Lagally, R.L. Park (Academic, Cambridge, MA 1985) Chap. 4

    Google Scholar 

  31. B. Feuerbacher, B. Fitton, R.F. Willis (eds.): Photoemission and the Electronic Properties of Surfaces (Wiley Interscience, New York 1978)

    Google Scholar 

  32. M. Cardona, L. Ley (eds.): Photoemission in Solids I, General Principles, Topics Appl. Phys., Vol. 26 (Springer, Berlin, Heidelberg 1978)

    Google Scholar 

  33. L. Ley, M. Cardona (eds.): Photoemission in Solids II, Case Studies, Topics Appl. Phys., Vol. 27 (Springer, Berlin, Heidelberg 1979)

    Google Scholar 

  34. C.N. Berglund, W.E. Spicer: Phys. Rev. 136, 1030, 1044 (1964)

    Article  CAS  Google Scholar 

  35. H.Y. Fan: Phys. Rev. 68, 43 (1945)

    Article  CAS  Google Scholar 

  36. W.E. Spicer: Phys. Rev. 112, 114 (1958)

    Article  CAS  Google Scholar 

  37. H. Mayer, H. Thomas: Z. Phys. 147, 149 (1959)

    Google Scholar 

  38. D.A. Shirley: Phys. Rev. B 5, 4709 (1972)

    Article  Google Scholar 

  39. L. Kleinman: Phys. Rev. B 3, 2982 (1971)

    Article  Google Scholar 

  40. D.R. Penn: Phys. Rev. B 13, 5248

    Google Scholar 

  41. L.I. Schiff: Quantum Mechanis (McGraw-Hill, New York 1955)

    Google Scholar 

  42. S. Doniach, M. Sunjic: J. Phys. E 3, 265 (1970)

    Article  Google Scholar 

  43. K. Siegbahn et al.: ESCA Applied to Free Molecules (North-Holland, Amsterdam 1959) p. 104

    Google Scholar 

  44. JJ. Joyce, M. del Giudice, J.H. Weaver: J. Electron Spectrosc. Relat. Phenom. 49, 31 (1989)

    Article  CAS  Google Scholar 

  45. G.K. Wertheim, P.H. Citrin: In [8.31]

    Google Scholar 

  46. J.B. Pendry: In [8.30]

    Google Scholar 

  47. G.K. Wertheim, S.B. Dicenzo: J. Electron Spectrosc. Relat. Phenom. 37, 57 (1985)

    Article  CAS  Google Scholar 

  48. G.A. Prinz; JJ. Krebs: Appl. Phys. Lett. 39, 397 (1981)

    Article  CAS  Google Scholar 

  49. C. Vittoria, FJ. Rachford, JJ. Krebs, G.A. Prinz: Phys. Rev. B 30, 3903 (1984)

    Article  CAS  Google Scholar 

  50. G.A. Prinz: Phys. Rev. Lett. 54, 1051 (1985)

    Article  CAS  Google Scholar 

  51. K. Schroder, G.A. Prinz, K.-H. Walker, E. Kisker: J. Appl. Phys. 57, 3669 (1985)

    Article  Google Scholar 

  52. G.A. Prinz, E. Kisker, H.B. Hathaway, K. Schroder, K.-H. Walker: J. Appl. Phys. 57, 3024 (1985)

    Article  CAS  Google Scholar 

  53. J.R. Waldrop, R.W. Grant: Appl. Phys. Lett. 34, 630 (1979)

    Article  CAS  Google Scholar 

  54. F. Xu, J.J. Joyce, M.W. Ruckman, H.-W. Chen, F. Boscherini, D.M. Hill, S.A. Chambers, J.H. Weaver: Phys. Rev. B 35, 2375 (1987)

    Article  CAS  Google Scholar 

  55. M. Grioni, JJ. Joyce, J.H. Weaver: J. Vac. Sci. Technol. A 4, 965 (1986)

    Article  CAS  Google Scholar 

  56. J. Nogami, T. Kendelewicz, I. Lindau, W.E. Spicer: Phys. Rev. B 34, 669 (1986)

    Article  CAS  Google Scholar 

  57. D.M. Hill, F. Xu, Zhangda Lin, J.H. Weaver: Phys. Rev. B 38, 1893 (1988)

    Article  CAS  Google Scholar 

  58. M.W. Ruckman, J.J. Joyce, J.H. Weaver: Phys. Rev. B 33, 7029 (1986)

    Article  CAS  Google Scholar 

  59. M.W. Ruckman, M. del Giudice, JJ. Joyce, J.H. Weaver: Phys. Rev. B 33, 2191 (1986)

    Article  CAS  Google Scholar 

  60. R. Ludeke, D. Straub, FJ. Himpsel, G. Landgren: J. Vac. Sci. Technol. A 4, 874 (1986)

    Article  CAS  Google Scholar 

  61. R. Ludeke, G. Landgren: Phys. Rev. B 33, 5526 (1986)

    Article  CAS  Google Scholar 

  62. F. Xu, D.M. Hill, Z. Lin, S.G. Anderson, Y. Shapira, J.H. Weaver: Phys. Rev. B 37, 10295 (1988)

    Article  CAS  Google Scholar 

  63. F. Xu, Z. Lin, DM. Hill, J.H. Weaver: Phys. Rev. B 35, 9353 (1987); ibid. 36, 6624 (1987)

    Article  CAS  Google Scholar 

  64. O. Wada, S. Yanagisawa, H. Takanashi: Appl. Phys. Lett. j29, 263 (1976)

    Article  Google Scholar 

  65. F. Xu, CM. Aldao, I.M. Vitomirov, Z. Lin, J.H. Weaver: Phys. Rev. B 36, 3495 (1987)

    Article  CAS  Google Scholar 

  66. C.M. Aldao, I.M. Vitomirov, F. Xu, J.H. Weaver: Phys. Rev. B 37, 6019 (1988)

    Article  CAS  Google Scholar 

  67. J.H. Weaver, M. Grioni, JJ. Joyce: Phys. Rev. B 31, 5348 (1985)

    Article  CAS  Google Scholar 

  68. M.D. Williams, T. Kendelewicz, R.S. List, N. Newman, C.E. McCants, I. Lindau, W.E. Spicer: J. Vac. Sci. Technol. B 3, 1202 (1985)

    Article  CAS  Google Scholar 

  69. P.W. Chye, I. Lindau, P. Pianetta, C.M. Garner, C.Y. Su, W.E. Spicer: Phys. Rev. B 18, 5545 (1978)

    Article  CAS  Google Scholar 

  70. W.P. Petro, T. Kendelewicz, I. Lindau, W.E. Spicer: Phys. Rev. B 34, 7089 (1986)

    Article  CAS  Google Scholar 

  71. D. Coulman, N. Newman, G.A. Reid, Z.Liliental-Weber, E.R. Weber, W.E. Spicer: J. Vac. Sci. Technol. A 5, 1521 (1987)

    Article  CAS  Google Scholar 

  72. F. Xu, Y. Shapira, D.M. Hill, J.H. Weaver: Phys. Rev. B 35, 7417 (1987)

    Article  CAS  Google Scholar 

  73. J.J. Joyce, M. Grioni, M. del Giudice, M.W. Ruckman, F. Boscherini, J.H. Weaver: J. Vac. Sci. Technol. A 5, 2019 (1987)

    Article  CAS  Google Scholar 

  74. T.G. Anderson, J. Kanski, G. Le Lay, S.P. Svensson: Surf. Sci. 168, 301 (1986)

    Article  Google Scholar 

  75. M.W. Ruckman, J.J. Joyce, J.H. Weaver: Phys. Rev. B 34, 5118 (1986)

    Article  CAS  Google Scholar 

  76. T. Yoshiie, C.L. Bauer: J. Vac. Sci. Technol. A 1, 554 (1983)

    Article  CAS  Google Scholar 

  77. T. Yoshiie, C.L. Bauer, A.G. Milnes: Thin Solid Films 111, 149 (1984)

    Article  Google Scholar 

  78. J.R. Lince, C.T. Tsai, R.S. Williams: J. Mater. Res. 1, 537 (1986)

    Article  CAS  Google Scholar 

  79. E. Beam, D.D.L. Chung: Mater. Res. Soc. Symp. Proc. 37, 595 (1985)

    Article  CAS  Google Scholar 

  80. C.M. Aldao, G.D. Waddill, S.G. Anderson, J.H. Weaver: Phys. Rev. B 40, 2932 (1989); a study of Ti/GaAs(110) interfaces formed at 60 and 300K

    Article  CAS  Google Scholar 

  81. G.D. Waddill, C.M. Aldao, I.M. Vitomirov, S.G. Anderson, C. Capasso, J.H. Weaver: J. Vac. Sci. Technol. B 7, 950 (1989)

    Article  CAS  Google Scholar 

  82. R. Ludeke, T.-C. Chiang, T. Miller: J. Vac. Sci. Technol. B 1, 581 (1983)

    Article  CAS  Google Scholar 

  83. K.K. Chin, S.H. Pan, D. Mo, P. Mahowald, N. Newman, I. Lindau, W.E. Spicer: Phys. Rev. B 32, 918 (1985)

    Article  CAS  Google Scholar 

  84. J. Tersoff: Surf. Sci. 168, 275 (1986); J. Vac. Sci. Technol. B 3, 1157 (1985)

    Article  CAS  Google Scholar 

  85. S.G. Louie, J.R. Chelikowsky, M.L. Cohen: Phys. Rev. B 15, 2154 (1977)

    Article  CAS  Google Scholar 

  86. W. Mönch: J. Vac. Sci. Technol. B 6, 1270 (1988); Europhys. Lett. 7, 275 (1988)

    Article  Google Scholar 

  87. J.E. Klepeis, W.A. Harrison: J. Vac. Sci. Technol. B 7, 964 (1989)

    Article  CAS  Google Scholar 

  88. I. Lefevre, M. Lannoo, G. Allan: Europhys. Lett. 10, 359 (1989) and private communication

    Article  Google Scholar 

  89. R.E. Viturro, S. Chang, J.L. Shaw, C. Mailhiot, L.J. Brillson, A. Terrasi, Y. Hwu, G. Margaritondo, P.D. Kirchner, J.M. Woodall: J. Vac. Sci. Technol. B 7, 1007 (1989) and private communication

    Article  CAS  Google Scholar 

  90. C.M. Aldao, S.G. Anderson, C. Capasso, G.D. Waddill, I.M. Vitomirov, J.H. Weaver: Phys. Rev. B 39, 12977 (1989)

    Article  CAS  Google Scholar 

  91. I.M. Vitomirov, G.D. Waddill, C.M. Aldao, S.G. Anderson, J.H. Weaver: Phys. Rev. B 40, 3483 (1989)

    Article  CAS  Google Scholar 

  92. S.G. Anderson, C.M. Aldao, GD. Waddill, IM. Vitomirov, S J. Severtson, J.H. Weaver: Phys. Rev. B 40, 8305 (1989)

    Article  CAS  Google Scholar 

  93. S.G. Anderson, CM. Aldao, G.D. Waddill, IM. Vitomirov, C. Capasso, J.H. Weaver: Appl. Phys. Lett. 55, 2547 (1989)

    Article  CAS  Google Scholar 

  94. M.H. Hecht: Phys. Rev. B Rapid Commun. 41, 7918 (1990)

    Google Scholar 

  95. C.M. Aldao, G.D. Waddill, PJ. Benning, C. Capasso, J.H. Weaver: Phys. Rev. B Rapid Commun. 41, 6092 (1990)

    CAS  Google Scholar 

  96. G.D. Waddill, C.M. Aldao, C. Capasso, PJ. Benning, Yongjun Hu, T.J. Wagener, M.B. Jost, J.H. Weaver: Phys. Rev. B 41, 5960 (1990)

    Article  CAS  Google Scholar 

  97. Yongjun Hu, T.J. Wagener, M.B. Jost, J.H. Weaver: Phys. Rev. B 40, 1146 (1989)

    Article  CAS  Google Scholar 

  98. T. Komeda, S.G. Anderson, JM. Seo, M.C. Schabel, J.H. Weaver: J. Vac. Sci. Technol. (in press)

    Google Scholar 

  99. W.F. Egelhoff, Jr., I. Jacob: Phys. Rev. Lett. 62, 921 (1989)

    Article  CAS  Google Scholar 

  100. J. Tersoff: Private communication

    Google Scholar 

  101. J.E. Demuth, WJ. Thompson, NJ. DiNardo, R. Imbihl: Phys. Rev. Lett. 56, 1408 (1986)

    Article  CAS  Google Scholar 

  102. K. Markert, P. Pervan, W. Heichler, K. Wandelt: J. Vac. Sci. Technol. A 7, 2873 (1989)

    Article  CAS  Google Scholar 

  103. G. Margaritondo, LJ. Brillson, N.G. Stoffel: Solid State Commun. 35, 277 (1980)

    Article  CAS  Google Scholar 

  104. R. Williams, R.H. Bube: J. Appl. Phys. 31, 968 (1960)

    Article  CAS  Google Scholar 

  105. IM. Vitomirov, CM. Aldao, G.D. Waddill, C. Capasso, J.H. Weaver: Phys. Rev. B 41, 8465 (1990)

    Article  CAS  Google Scholar 

  106. G.D. Waddill, T. Komeda, Y.N. Yang, J.H. Weaver: Phys. Rev. B Rapid Commun. 41, 10283 (1990)

    CAS  Google Scholar 

  107. M. Vos, C.M. Aldao, DJ.W. Aastuen, J.H. Weaver: Phys. Rev. B 41, 991 (1990) [Ag/ZnSe(100)]

    Article  CAS  Google Scholar 

  108. CM. Aldao, DJ.W. Aastuen, M. Vos, IM. Vitomirov, G.D. Waddill, PJ. Benning, J.H. Weaver: Phys. Rev. B 42, 2878 (1990) [Ag/InP(110) and In/GaAs(110)]

    Article  CAS  Google Scholar 

  109. JM.E. Harper: In Thin Film Processes, ed. by J.L. Vossen, W. Kern (Academic, New York 1978)

    Google Scholar 

  110. M.-A. Hasan, S.A. Barnett, J.-E. Sundgren, J.E. Greene: J. Vac. Sci. Technol. A 5, 1883 (1987)

    Article  CAS  Google Scholar 

  111. S.-N. Mei, T.-M. Lu, S. Robert: IEEE Electron. Dev. Lett. 8, 503 (1987)

    Article  Google Scholar 

  112. J. Lindhard, M. Scharff, H.E. Schiott: Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 33, No. 14 (1963)

    Google Scholar 

  113. This theory was developed for ions with an energy of many keV and the application to the current case should be considered only as an educated guess. For defect depth distributions, see: J.Y. Tsai, E. Chason, K.M. Horn, D.K. Brice, S.T. Picraux: Nucl. Instrum. Methods B 39, 72 (1989)

    Article  Google Scholar 

  114. M. Vos, F. Xu, S.G. Anderson, J.H. Weaver, H. Cheng: Phys. Rev. B 39, 10744 (1989)

    Article  CAS  Google Scholar 

  115. LJ. Brillson: Phys. Rev. Lett. 40, 260 (1978)

    Article  CAS  Google Scholar 

  116. J.L Shaw, R.E. Viturro, LJ. Brillson, D. Kilday, M. Kelly, G. Margaritondo: J. Vac. Sci. Technol. A 6, 1579 (1988)

    Article  CAS  Google Scholar 

  117. I. Lindau, T. Kendelewicz: CRC Crit. Rev. Solid State Mat. Sci. 13, 27 (1987)

    Article  Google Scholar 

  118. R.R. Daniels, T.-X. Zhao, G. Margaritondo: J. Vac. Sci. Technol. A 2, 831 (1984)

    Article  CAS  Google Scholar 

  119. K.K. Chin, T. Kendelewicz, C. McCants, R. Cao, K. Miyano, I. Lindau, W.E. Spicer: J. Vac. Sci. Technol. A 4, 969 (1986)

    Article  CAS  Google Scholar 

  120. D.E. Savage, M.G. Lagally: J. Vac. Sci. Technol. B 4, 943 (1985)

    Article  Google Scholar 

  121. A. Zunger: Phys. Rev. B 24, 4372 (1981)

    Article  CAS  Google Scholar 

  122. R.R. Daniels, A.D. Katnani, T.-X. Zhao, G. Margaritondo, A. Zunger: Phys. Rev. Lett. 49, 895 (1982)

    Article  CAS  Google Scholar 

  123. G.D. Waddill, I.M. Vitomirov, CM. Aldao, J.H. Weaver: Phys. Rev. Lett. 62, 1568 (1989)

    Article  CAS  Google Scholar 

  124. G.D. Waddill, I.M. Vitomirov, C.M. Aldao, S.G. Anderson, C. Capasso, J.H. Weaver, Z. Liliental-Weber: Phys. Rev. B 41, 5293 (1990)

    Article  CAS  Google Scholar 

  125. R. Ludeke, T.-C. Chiang, D.E. Eastman: J. Vac. Sci. Technol. 21, 599 (1982)

    Article  CAS  Google Scholar 

  126. V. Heine: Phys. Rev. A 138, 1689 (1965)

    CAS  Google Scholar 

  127. DJ. Chadi: Phys. Rev. B 18, 1800 (1978)

    Article  CAS  Google Scholar 

Download references

Authors
  1. John H. Weaver
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN, 55455, USA

    James R. Chelikowsky  & Alfonso Franciosi  & 

Rights and permissions

Reprints and permissions

Copyright information

© 1991 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Weaver, J.H. (1991). Formation and Properties of Metal—Semiconductor Interfaces. In: Chelikowsky, J.R., Franciosi, A. (eds) Electronic Materials. Springer Series in Solid-State Sciences, vol 95. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-84359-4_8

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-84359-4_8

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-84361-7

  • Online ISBN: 978-3-642-84359-4

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation