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Physics and Technology of Submicron Structures pp 263–277Cite as

Physics and Fabrication of Metal-Semiconductor Microstructures

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Part of the book series: Springer Series in Solid-State Sciences ((SSSOL,volume 83))

Abstract

Thanks to advances in ultra-high vacuum technology, it has recently become possible to realize epitaxial semiconductor/metal/semiconductor (SMS) structures [1, 2] using a Si/CoSi2/Si sandwich. The rather small lattice mismatch (~ 1.2%) between Si and CoSi2 crystals as well as their similar cubic structures allows the production of monocrystalline Si/CoSi2 and Si/CoSi2/Si heterostructures. These SMS structures open the way to promising ultra-low base resistance devices for millimeter wave applications.

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Author information

Authors and Affiliations

  1. Centre National d’Etudes des Télécommunications, Chemin du Vieux Chêne, B.P:98, F-38243, Meylan Cedex, France

    E. Rosencher & P. A. Badoz

Authors
  1. E. Rosencher
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  2. P. A. Badoz
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Editor information

Editors and Affiliations

  1. Institut für Experimentalphysik, Universität Linz, A-4040, Linz, Austria

    Helmut Heinrich

  2. Institut für Physik, Montanuniversität Leoben, A-8700, Leoben, Austria

    Günther Bauer

  3. Institut für Festkörperphysik, Universität Wien, A-1090, Wien, Austria

    Friedemar Kuchar

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© 1988 Springer-Verlag Berlin Heidelberg

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Rosencher, E., Badoz, P.A. (1988). Physics and Fabrication of Metal-Semiconductor Microstructures. In: Heinrich, H., Bauer, G., Kuchar, F. (eds) Physics and Technology of Submicron Structures. Springer Series in Solid-State Sciences, vol 83. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-83431-8_24

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  • DOI: https://doi.org/10.1007/978-3-642-83431-8_24

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-83433-2

  • Online ISBN: 978-3-642-83431-8

  • eBook Packages: Springer Book Archive

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