Skip to main content
SpringerLink
Log in

Laser-Assisted Oxidation and Nitridation

  • Chapter
Laser Processing of Thin Films and Microstructures

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 3))

Abstract

This chapter will review the laser-assisted growth of insulating films through controlled heating in the solid phase. Oxidation, being the most studied reaction in this area, forms the largest section of the chapter, although nitridation, and polymerization of thin organic films by laser induced thermal effects will also be discussed here. The tables in this chapter summarize all the oxide films formed by laser induced mechanisms that have been reported in the literature. The wider range of different techniques encompassed in these processes will be described in the following Chapters 5 and 6), which deal with insulator formation via laser induced phase changes, and laser assisted deposition. Our attention will not be restricted to dielectric layers for silicon technology, although this is where most attention has been focused; the formation of insulating layers on other semiconducting materials and metals, will also be discussed. These latter areas have enormous potential for advancing the expanding optoelectronic processing capabilities as well as localized surface hardening and protection for micromechanical applications.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. N. Cabrera, N.F. Mott: Rep. Prog. Phys. 12, 163 (1948/1949)

    ADS  Google Scholar 

  2. F.P. Fehlner, N.F. Mott: Oxidation in Metals 2, 59 (1970)

    Google Scholar 

  3. E.J.W. Verwey: Physica 2, 1059 (1932)

    ADS  Google Scholar 

  4. C. Wagner: Z. Physik. Chem. B 32, 447 (1936)

    Google Scholar 

  5. B.E. Deal, A.S. Grove: J. Appl. Phys. 36, 3770 (1965)

    ADS  Google Scholar 

  6. I.W. Boyd, J.I.B. Wilson: J. Appl. Phys. 53, 4166 (1982)

    ADS  Google Scholar 

  7. H. Ibach, K. Horn, R. Dorn, H. Lüth: Surf. Sci. 38, 433 (1973)

    ADS  Google Scholar 

  8. C.M. Garner, I. Lindau, C.Y. Su, P. Pianetta, W. Spicer: J. Vac. Sci. Technol. 4, 372 (1977)

    Google Scholar 

  9. R. Karchner, L. Ley: Solid State Commun. 43, 415 (1982)

    ADS  Google Scholar 

  10. C. Camelin, G. Demazeau, A. Straboni, J.L. Buevoz: Appl. Phys. Lett. 48, 1211 (1986)

    ADS  Google Scholar 

  11. D.N. Modlin, W.A. Tiller: J. Electrochem. Soc. 132, 1659 (1985)

    Google Scholar 

  12. L.M. Landsberger, W.A. Tiller: Appl. Phys. Lett. 49, 143 (1986)

    ADS  Google Scholar 

  13. M.A. Hopper, R.A. Clark, L. Young: J. Electrochem. Soc. 122, 1216 (1975)

    Google Scholar 

  14. E.A. Irene, Y.J. van der Meulen: J. Electrochem. Soc. 123, 1380 (1976)

    Google Scholar 

  15. Y. Kamigaki, Y. Itoh: J. Appl. Phys. 48, 2891 (1977)

    ADS  Google Scholar 

  16. A.C. Adams, T.E. Smith, C.C. Chang: J. Electrochem. Soc. 127, 1787 (1980)

    ADS  Google Scholar 

  17. A.G. Revesz, R.J. Evans, J. Phys. Chem. Sol. 30, 551 (1969)

    ADS  Google Scholar 

  18. E.A. Irene: J. Appl. Phys. 54, 5416 (1983)

    ADS  Google Scholar 

  19. R.H. Doremus: Thin Solid Films 122, 191 (1984)

    ADS  Google Scholar 

  20. A. Fargeix, G. Ghibaudo, G. Kamarinos: J. Appl. Phys. 54, 2878 (1983)

    ADS  Google Scholar 

  21. A.S. Grove: Physics and Technology of Semiconductor Devices (Wiley, New York 1967)

    Google Scholar 

  22. W.A. Tiller: J. Electrochem. Soc. 128, 689 (1981)

    Google Scholar 

  23. A. Lora-Tamayo, E. Dominguez, E. Lora-Tamayo, J. Llabres: Appl. Phys. 17, 79 (1978)

    ADS  Google Scholar 

  24. S.M. Hu: Appl. Phys. Lett. 42, 872 (1983)

    ADS  Google Scholar 

  25. Y.Z. Lu, Y.C. Cheng: J. Appl. Phys. 56, 1608 (1984)

    ADS  Google Scholar 

  26. S.A. Schafer, S.A. Lyon: Appl. Phys. Lett. 47, 154 (1985)

    ADS  Google Scholar 

  27. R. Ghez, Y.J. van der Meulen: J. Electrochem. Soc. 119, 1100

    Google Scholar 

  28. J. Blanc: Appl. Phys. Lett. 33, 424 (1978)

    ADS  Google Scholar 

  29. W.A. Tiller; J. Electrochem. Soc. 119, 591 (1980)

    Google Scholar 

  30. P.J. Jorgensen: J. Chem. Phys. 37, 874 (1962)

    ADS  Google Scholar 

  31. D.O. Raleigh: J. Electrochem. Soc. 113, 782 (1966)

    Google Scholar 

  32. W.A. Tiller: J. Electrochem. Soc. 127, 619 (1980)

    Google Scholar 

  33. T.G. Mills, F.A. Kroger: J. Electrochem. Soc. 12, 1582 (1973)

    Google Scholar 

  34. N.F. Mott, Phil. Mag. 55, 117 (1987)

    Google Scholar 

  35. M.M. Atalla: In Properties of Elemental and Compound Semiconductors, ed. by H. Gatos (Interscience, New York 1960) Vol 5, pp. 163–181

    Google Scholar 

  36. J.R. Ligenza, W.G. Spicer: J. Phys. Chem. Solids 14, 131 (1960)

    ADS  Google Scholar 

  37. E. Rosencher, A. Straboni, S. Rigo, G. Amsel: Appl. Phys. Lett. 34, 254 (1979)

    ADS  Google Scholar 

  38. F. Rochet, B. Agius, S. Rigo: J. Electrochem. Soc. 121, 914 (1984)

    Google Scholar 

  39. J.C. Mikkelsen: Appl. Phys. Lett. 45, 1189 (1985)

    Google Scholar 

  40. N.F. Mott: Phil. Mag. A 45, 323 (1982)

    ADS  Google Scholar 

  41. W.A. Tiller: J. Electrochem Soc. 127, 625 (1980)

    Google Scholar 

  42. J.F. Asmus, F.S. Baker: Record of 10th Symp. on Electron, Ion, and Laser Beam Technology San Francisco Press, San Francisco (1969) p.241

    Google Scholar 

  43. A.G. Akimov, A.P. Gagarin, V.G. Dugarov, V.S. Makin, S.D. Pudkov: Sov. Phys. Tech. Phys. 25, 1439 (1980)

    Google Scholar 

  44. M.I. Arzuov, A.I. Barchukov, F.V. Bunkin, N.A. Kirichenko, V.I.B.S. Luk’yanchuk: Sov. J. Quantum Electron. 9, 281 (1979)

    ADS  Google Scholar 

  45. V.P. Veiko, G.A. Kotov, M.N. Libenson, M.N. Nikitin: Sov. Phys. Doklady 18, 83 (1973)

    ADS  Google Scholar 

  46. M.I. Arzuov, A.I. Barchukov, F.V. Bunkin, V.I. Konov, A.A. Lyubin: Sov. J. Quant. Electron. 5, 931 (1976)

    ADS  Google Scholar 

  47. I.W. Boyd: Contemp. Phys. 24, 461 (1983)

    ADS  Google Scholar 

  48. I. Ursu, L.Nanu, M. Dinescu, Al. Hening, I.N. Mihailescu, L.C. Nistor, V.S. Teodorescu, E. Szil, I. Hevesi, J. Kovacs, L. Nanai: Appl. Phys. A 35, 103, (1984)

    ADS  Google Scholar 

  49. I. Ursu, L.C. Nistor, V.S. Teodorescu, I.N. Mihailescu, L. Nanu, A.M. Prokhorov, N.I. Chaplieu, V.I. Konov: Appl. Phys. Lett. 44, 188 (1984)

    ADS  Google Scholar 

  50. I. Ursu, L. Nanu, I.N. Mihailescu, L.C. Nistor, V.S. Teodorescu, A.M. Prokhorov, V.I. Konov, N.I. Chaplieu: J. Physique. Lett. 45, L737 (1984)

    Google Scholar 

  51. M. Wautelet, L. Baufay: Thin Solid Films 100, L9 (1983)

    ADS  Google Scholar 

  52. M. Wautelet: Mat. Lett. 2, 20 (1984)

    Google Scholar 

  53. R. Andrew: In Interfaces Under Laser Radiation, ed. by L.D. Laude, D. Bäuerle, M. Wautelet (Nijhoff, The Hague 1987)

    Google Scholar 

  54. R. Merlin, T.A. Perry: Appl. Phys. Lett. 45, 852 (1984)

    ADS  Google Scholar 

  55. A.G. Akimov, A.M. Bonch-Bruevich, A.P. Gargarin, V.G. Dorofeev, P.A. Zimin, I.N. Ivanova, M.N. Libenson, V.S. Makin, S.D. Pudkov: Bull. Acad. USSR Phys. Ser. 46, 145 (1982)

    Google Scholar 

  56. M. Thuillard, M. von Allmen: Appl. Phys. Lett. 47, 936 (1985)

    ADS  Google Scholar 

  57. R.F. Marks, R.A. Poliak: J. Chem. Phys. 81, 1019 (1984)

    ADS  Google Scholar 

  58. R.F. Marks, R.F. Pollack, Ph. Avouris, C.T. Lin, Y.J. Thefaine: J. Chem. Phys. 78, 4270 (1983) and references therein

    ADS  Google Scholar 

  59. S.M. Metev, S.K. Savtchenko, K. Stamenov: J. Phys. D 13, L75 (1980)

    ADS  Google Scholar 

  60. S.T. Pantelides: The Physics of SiO 2 and Its Interfaces (Pergamon, New York 1978) and references therein

    Google Scholar 

  61. B.E. Deal: In Semiconductor Silicon, ed. by H.H. Huff, E.Sirtl (Electrochem. Soc., Princeton 1977) p.276

    Google Scholar 

  62. L.I. Maissel: In Handbook of Thin Film Technology, ed. by L.I. Maissel, R. Glang (McGraw-Hill, New York 1970) Chap.4

    Google Scholar 

  63. J.L. Vossen: J. Vac. Sci. Technol. 8, 512 (1971)

    Google Scholar 

  64. W.A. Pliskin, R.A. Gdula: In Handbook on Semiconductors, ed. by T.S. Moss (North-Holland, Amsterdam 1982) p.641

    Google Scholar 

  65. K. Urbanek: Solid State Technol. 20, 87 (1977)

    Google Scholar 

  66. See, e.g., S. Dzioba, G. Este, H.M. Naguib: J. Electrochem. Soc. 129, 2537 (1982) and references therein

    Google Scholar 

  67. V.Q. Ho: Jpn. J. Appl. Phys. Suppl.1, 19, 103 (1983)

    Google Scholar 

  68. T. Tokuyama, S. Kimura, T. Warabisako, E. Murakami, K. Miyake: In Laser Processing and Diagnostics, ed. by D. Bäuerle, Springer Ser. Chem. Phys., Vol.39 (Springer, Berlin, Heidelberg 1984) p.288

    Google Scholar 

  69. J.R. Ligenza, W.G. Spicer: J. Phys. Chem. Solids 14, 132 (1960)

    ADS  Google Scholar 

  70. R.J. Zeto, N.O. Korolkoff, S. Marshall: Solid State Techn. 22, 62 (July 1979)

    Google Scholar 

  71. J.F. Gibbons: Jpn. J. Appl. Phys., Suppl., 19, 121 (1981)

    Google Scholar 

  72. I.W. Boyd, J.I.B. Wilson, J.L. West: Thin Solid Films 83, L173 (1981)

    ADS  Google Scholar 

  73. S.A. Schafer, S.A. Lyon: J. Vac. Sci. Technol. 19, 494 (1981)

    ADS  Google Scholar 

  74. I.W. Boyd, J.I.B. Wilson: Appl. Phys. Lett. 41, 162 (1982)

    ADS  Google Scholar 

  75. S.A. Schafer, S.A. Lyon: J. Vac. Sci. Technol. 21, 422 (1982)

    ADS  Google Scholar 

  76. E.M. Young, W.A. Tiller: Appl. Phys. Lett. 42, 63 (1983)

    ADS  Google Scholar 

  77. I.W. Boyd: Appl. Phys. Lett. 42, 728 (1983)

    ADS  Google Scholar 

  78. I.W. Boyd, T.D. Binnie, J.I.B. Wilson, M.J. Colles: J. Appl. Phys. 55, 3061 (1984)

    ADS  Google Scholar 

  79. H.S. Carslaw, J.C. Jaeger: Conduction of Heat in Solids (Clarendon, Oxford 1959)

    Google Scholar 

  80. H.W. Ho, A. Compaan: J. Appl. Phys. 51, 1565 (1980)

    ADS  Google Scholar 

  81. I.W. Boyd: In Dielectric Layers in Semiconductors, ed. by G.G. Bentini, E. Fogarassy, A. Golanski (Les Editions de Physique, Les Ulis 1986) p.177

    Google Scholar 

  82. I.W. Boyd, S.C. Moss: In Laser Chemical Processing of Semiconductor Devices, Extended abstracts of MRS Symp.B, ed. by F.A. Houle, T.F. Deutsch, R.M. Osgood (Materials Research Society, Pittsburgh 1984) p.132

    Google Scholar 

  83. I.W. Boyd, F. Micheli: Electron. Lett. 23, 298 (1987)

    Google Scholar 

  84. P.A. Bertrand: J. Vac. Sci. Technol. 132, 973 (1985)

    Google Scholar 

  85. J. Siejka, J. Perriere, R. Srinivasan: Appl. Phys. Lett. 46, 773 (1985)

    ADS  Google Scholar 

  86. K.A. Bertness, W.G. Petro, J.A. Silberman, D.J. Friedman, W.E. Spicer: J. Vac. Sci. Technol. A 3, 1464 (1985)

    ADS  Google Scholar 

  87. W.G. Petro, I. Hino, S. Eglash, I. Lindau, C.Y. Su, W.E. Spicer: J. Vac. Sci. Technol. 21, 405 (1982)

    ADS  Google Scholar 

  88. V.M. Bermudez: J. Appl. Phys. 54, 6795 (1983)

    ADS  Google Scholar 

  89. M. Fukuda, K. Takahei: J. Appl. Phys. 57, 129 (1985)

    ADS  Google Scholar 

  90. M. Fathipour, P.K. Boyer, G.J. Collins, C.W. Wilmsen: J. Appl. Phys. 57, 637 (1985)

    ADS  Google Scholar 

  91. S.E. Blum, K. Brown, R. Srinivasan: Appl. Phys. Lett. 43, 1026 (1983)

    ADS  Google Scholar 

  92. T. Sugii, T. Ho, H. Ishikawa Appl. Phys. Lett. 45, 966 (1984)

    ADS  Google Scholar 

  93. T.J. Chuang, I. Hussla, W. Sesselmann: In Laser Processing and Diagnostics, ed. by D. Bäuerle, Springer Ser. Chem. Phys., Vol.39 (Springer, Berlin, Heidelberg 1984) p.300

    Google Scholar 

  94. C.I.H. Ashby: Appl. Phys. Lett. 43, 609 (1983)

    ADS  Google Scholar 

  95. I.W. Boyd: In Interfaces Under Laser Radiation, ed. by L.D. Laude, D. Bäuerle, M. Wautelet (Martinus Nijhoff, The Hague 1987) p.409

    Google Scholar 

  96. R. Oren, S.K. Ghandi: Appl. Phys. Lett. 42, 752 (1971)

    Google Scholar 

  97. C. Fiori: Phys. Rev. Lett. 52, 2077 (1984)

    ADS  Google Scholar 

  98. R.T. Young, J. Narayan, W.H. Christie, G.A. van der Leeden, D.E. Rothe, L.J. Chen: Solid State Techn. 26, 183 (1983)

    Google Scholar 

  99. I.W. Boyd: J. Appl. Phys. 54, 3561 (1983)

    ADS  Google Scholar 

  100. W.A. Pliskin, H.S.Lehmann: J. Electrochem. Soc. 112, 1013 (1965)

    Google Scholar 

  101. M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, T. Nozaki: Solid State Commun. 50, 1079 (1984)

    ADS  Google Scholar 

  102. E. Hensel, K. Wollschläger, D. Schulze, U. Kreissig, W. Skorupa, J. Finster: Surface and Interface Analysis 7, 205 (1985)

    Google Scholar 

  103. I.W. Boyd, J.I.B. Wilson: Appl. Phys. Lett. 50, 320 (1987)

    ADS  Google Scholar 

  104. T.E. Orlowski, H. Richter: Appl. Phys. Lett. 45, 241 (1984)

    ADS  Google Scholar 

  105. H. Zarnani, P.K. Boyer, M. Fathipour, C.W. Wilmsen, R. Solanki, G.J. Collins: In Laser Chemical Processing of Semiconductor Devices, ed. by F.A. Houle, T.F. Deutsch, R.M. Osgood (MRS, Pittsburgh 1984) p.122

    Google Scholar 

  106. C.M. Gronet, J.C. Sturm, K.E. Williams, J.F. Gibbons: In Rapid Thermal Processing, ed. by T.O. Sedgwick, T.E. Seidel, B.-Y. Tsaur (Materials Research Society, Pittsburgh 1986) p.305

    Google Scholar 

  107. J.C. Gelpey, P.O. Stump, R.A. Capodilupo: In Rapid Thermal Processing, ed. by T.O. Sedgwick, T.E. Seidel, B.-Y. Tsaur (Materials Research Society, Pittsburgh 1986) p.321

    Google Scholar 

  108. Z.A. Weinberg, T.N. Nguyen, S.A. Cohen, R. Kalish: In Rapid Thermal Processing, ed. by T.O. Sedgwick, T.E. Seidel, B.-Y. Tsaur (Materials Research Society, Pittsburgh 1986) p.327

    Google Scholar 

  109. J. Nulman, J.P. Krusius, N. Shah, A. Gat, A. Baldwin: J. Vac. Sci. Technol. A 4, 1005 (1986)

    ADS  Google Scholar 

  110. J.P. Ponpon, J.J. Grob, A. Grob, R. Stuck: J. Appl. Phys. 59, 3921 (1986)

    ADS  Google Scholar 

  111. N. Chan Tung, Y. Caratini, L. Liauzu: In Dielectric Layers in Semiconductors, ed. by G.G. Bentini, E. Fogarassy, A. Golanski (Les Editions de Physique, Les Ulis 1986) p.247

    Google Scholar 

  112. J. Nulman, J.P. Krusius, A. Gat: IEEE EDL-6, 205 (1985)

    Google Scholar 

  113. M.M. Moslehi, S.C. Shatas, K.C. Saraswat: Appl. Phys. Lett. 47, 1353 (1985)

    ADS  Google Scholar 

  114. M.M. Moslehi, K.C. Saraswat: IEEE J. SC-20, 26 (1985)

    Google Scholar 

  115. M.M. Moslehi, K.C. Saraswat, S.C. Shatas: Appl. Phys. Lett. 47, 1113 (1985)

    ADS  Google Scholar 

  116. H.Z. Massoud, J.D. Plummer, E.A. Irene: J. Electrochem. Soc.132, 1745 (1985)

    Google Scholar 

  117. A.M. Hodge, C. Pickering, A.J. Pidduck, R.W. Hardeman: In Rapid Thermal Processing, ed. by T.O. Sedgwick, T.E. Seidel, B.-Y. Tsaur (Materials Research Society, Pittsburgh 1986) p.313

    Google Scholar 

  118. J.J. Bentini, M. Berti, C.Cohen, A.V. Drigo, E. Jannitti, D. Pribat, J. Siejka: J. Physique 43, C1–229 (1982)

    Google Scholar 

  119. C. Cohen, J. Siejka, M. Berti, A.V. Drigo, G.G. Bentini, D. Pribat, E. Jannitti: J. Appl. Phys. 55, 4081 (1984)

    ADS  Google Scholar 

  120. K.A. Bertness, W.G. Petro, J.A. Silberman, D.J. Friedman, T. Kendelwicz, W.E. Spicer: In Laser Chemical Processing of Semiconductor Devices, ed. by F.A. Houle, T.F. Deutsch, R.M. Osgood (MRS, Pittsburgh 1984) p.129

    Google Scholar 

  121. T. Ito, T. Nozaki, H. Arkawa, M. Shinoda: Appl. Phys. Lett. 32, 330 (1978)

    ADS  Google Scholar 

  122. R.P.H. Chang, C.C. Chang, S. Darak: Appl. Phys. Lett. 36, 999 (1980)

    ADS  Google Scholar 

  123. T. Ito, I. Kato, T. Nozaki, T. Nakamura, H. Ishikawa: Appl. Phys. Lett. 38, 370 (1981)

    ADS  Google Scholar 

  124. H. Nakamura, M. Kaneko, S. Matsumoto, S. Fukita, A. Sasaki: Appl. Phys. Lett. 43, 691 (1983)

    ADS  Google Scholar 

  125. S. Wong, W. Oldham: IEEE EDL-5, 175 (1984)

    Google Scholar 

  126. M. Hirayama, T. Matsukawa, H. Arima, Y. Ohno, N. Tsubouchi, H. Nakata: J. Electrochem. Soc. 131, 663 (1984)

    Google Scholar 

  127. C.Y. Wu, D.W. King, M.K. Lee, C.T. Chen: J. Electrochem. Soc. 129, 1559 (1982)

    Google Scholar 

  128. I. Ursu, I. N. Mihailescu, L. Nanu, A.M. Prokhorov, V.I. Konov, V.G. Ralchenko, Appl. Phys. Lett. 46, 110 (1985)

    ADS  Google Scholar 

  129. I. Ursu, I.N. Mihailescu, A.M. Prokhorov, V.I. Konov, V.N. Tokarev, S.A. Uglov: J. Phys. D 18, 2547 (1985)

    ADS  Google Scholar 

  130. I. Ursu, I.N. Mihailescu, A.M. Prokhorov, V.I. Konov: Trends in Quantum Electronics, ed. by I.Ursu, A.M. Prokhorov (Springer, Berlin, Heidelberg; Institute of Physics, Bucharest 1986) and references therein.

    Google Scholar 

  131. R.R. Krchnavek, H.H. Gilgen, R.M. Osgood: J. Vac. Sci. Technol. B 2, 641 (1984)

    Google Scholar 

  132. T. Nakayama, M. Okigawa, N. Itoh: Nucl. Inst. Meth. Phys. Res. B 1, 301 (1984)

    ADS  Google Scholar 

  133. M. Matsuura, M. Ishida, A. Suzuki, K. Hara: Jpn. J. Appl. Phys. 20, L726 (1981)

    ADS  Google Scholar 

  134. J.T. Yardley, A. Gupta, G. West, K.W. Beeson: In Laser Chemical Processing of Semiconductor Devices, ed. by F.A. Houle, T.F. Deutsch, R.M. Osgood, Extended Abstracts of Symp. B (MRS, Pittsburgh 1984) p.121

    Google Scholar 

  135. R. Solanki, W. Ritchie, G.J. Collins: Appl. Phys. Lett. 43, 454 (1983)

    ADS  Google Scholar 

  136. T.F. Deutsch, D.J. Silversmith, R.W. Mountain: In Laser Diagnostics and Photochemical, Processing for Semiconductor Devices, ed. by R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (North-Holland, Amsterdam, 1983) p.129

    Google Scholar 

  137. W.M. Donnelly, M. Geva, J. Long, R.F. Karlicek: Appl. Phys. Lett. 44, 951 (1984)

    ADS  Google Scholar 

  138. S. Nishino, H. Honda, H. Matsunami: Jpn. J. Appl. Phys.25, L87 (1986)

    ADS  Google Scholar 

  139. S.D. Allen: SPIE 198, 49 (1979)

    Google Scholar 

  140. R. Solanki, G.J. Collins: Appl. Phys. Lett. 42, 662 (1983)

    ADS  Google Scholar 

  141. H. Sankur, J.T. Cheung: J. Vac. Sci. Technol. A 1, 1806 (1983)

    ADS  Google Scholar 

  142. H. Sankur: SPIE 459, 78 (1984)

    Google Scholar 

  143. G.G. Bentini, M. Berti, A.V. Drigo, E. Jannitti, C. Cohen, J. Siejka: In Laser Chemical Processing of Semiconductor Devices, ed. by F.A. Houle, T.F. Deutsch, R.M. Osgood (MRS, Pittsburgh 1984) p.126

    Google Scholar 

  144. P.K. Boyer, G.A. Roche, W.H. Ritchie, G.J. Collins: Appl. Phys. Lett. 40, 716 (1982)

    ADS  Google Scholar 

  145. P.K. Boyer, K.A. Emery, H. Zarnani, G. J. Collins: Appl. Phys. Lett. 45, 979 (1984)

    ADS  Google Scholar 

  146. S. Szikora, W. Krauter, D. Bäuerle: Mat. Lett. 2, 263 (1984)

    Google Scholar 

  147. Y. Hirota, O. Mikami: Electron. Lett. 21, 77 (1985)

    Google Scholar 

  148. S.W. Chiang, Y.S. Liu, R.F. Reihl: In Laser and Electron Beam Solid Interactions and Materials Processing, ed. by J.F. Gibbons, L.D. Hess, T.W. Sigmon (Elsevier, New York 1981)

    Google Scholar 

  149. A. Garulli, M. Servidori, I. Vecchi: J. Appl. Phys. D 13, L199 (1981)

    Google Scholar 

  150. E. Fogarassy, C.W. White, D.H. Lowndes, J. Narayan: In Beam-Solid Interactions and Phase Transformations, ed. by H. Kurz, G.L. Olson, J.M. Poate (MRS, Pittsburgh 1986) p.173

    Google Scholar 

  151. I.W. Boyd: Appl. Phys. A 31, 71 (1983)

    ADS  Google Scholar 

  152. K. Hoh, H. Koyama, K. Uda, Y. Miura: Jpn. J. Appl. Phys. 19, L375 (1980)

    ADS  Google Scholar 

  153. K. Tamagawa, T. Hayashi, S. Komiya: Jpn. J. Appl. Phys. 25, L728 (1986)

    ADS  Google Scholar 

  154. A. Sugimura, M. Hanabusa: Jpn. J. Appl. Phys. 26, L56 (1987)

    ADS  Google Scholar 

  155. A. Cros, R. Salvan, J. Derrien: Appl. Phys. A 28, 241 (1982)

    ADS  Google Scholar 

  156. Y.S. Liu, S.W. Chiang, F. Bacon: Appl. Phys. Lett. 38, 1005 (1981)

    ADS  Google Scholar 

  157. Y.S. Liu, S.W. Chiang, W. Katz: In Laser and Electron Beam Interactions with Solids, ed. by B.R. Appleton, G.K. Celler (Elsevier, New York 1982)

    Google Scholar 

  158. M. Morita, S. Aritomi, T. Tanaka, M. Hirose: Appl. Phys. Lett. 49, 699 (1986)

    ADS  Google Scholar 

  159. M.I. Birjega, L. Nanu, I.N. Mihailescu, M. Dinescu, N. Popescu-pogrlon, C. Sarbu: Optica Acta 33, 1073 (1986)

    ADS  Google Scholar 

  160. E. Fogarassy, S. Unamuno, J.L. Regolini, C. Fuchs: Phil. Mag. B 55, 253 (1987)

    Google Scholar 

  161. R. Andrew: Appl. Phys. B 41, 205 (1986)

    ADS  MathSciNet  Google Scholar 

  162. I. Ursu, L. Nanu, I.N. Mihailescu: Appl. Phys. Lett. 49, 109 (1986)

    ADS  Google Scholar 

  163. J.M. Jasinski, B.S. Meyerson, T.N. Nguyen: J. Appl. Phys. 61, 431 (1987)

    ADS  Google Scholar 

  164. S.B. Ogale, P.P. Patil, S. Roorda, F.W. Saris: Appl. Phys. Lett. 50, 1802 (1987)

    ADS  Google Scholar 

  165. E.T.S. Pan, J.H. Flint, D. Adler, J.S. Haggerty: J. Appl. Phys. 61, 4535 (1987)

    ADS  Google Scholar 

  166. R.A.P. Devine, G. Auvert: Appl. Phys. Lett. 49, 1605 (1986)

    ADS  Google Scholar 

Recommendations for Further Reading

  • Kelly M.J., C. Weisbuch (eds.): The Physics and Fabrication of Microstructures and Microdevices, Springer Proc. Phys., Vol.13 (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  • Le Lay G., J. Derrien, N. Boccara (eds.): Semiconductor Interfaces: Formation and Properties, Springer Proc. Phys., Vol.22 (Springer, Berlin, Heidelberg 1987)

    Google Scholar 

  • Nicollian E.H., J.R. Brews: MOS Physics and Technology (Wiley, New York, 1982)

    Google Scholar 

  • Nizzoli F., K.-H. Rieder, R.F. Willis (eds.): Dynamical Phenomena at Surfaces, Interfaces and Superlattices, Springer Ser. Surf. Sci., Vol.3 (Springer, Berlin, Heidelberg 1985)

    Google Scholar 

  • Sedgewick T.O., T.E. Seidel, B.-Y. Tsaur (eds.): Rapid Thermal Processing, Proc. MRS 52 (MRS, Pittsburgh 1986)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electronic and Electrical Engineering, University College London, Torrington Place, London, WCIE 7JE, UK

    Dr. Ian W. Boyd

Authors
  1. Dr. Ian W. Boyd
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

Copyright information

© 1987 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Boyd, I.W. (1987). Laser-Assisted Oxidation and Nitridation. In: Laser Processing of Thin Films and Microstructures. Springer Series in Materials Science, vol 3. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-83136-2_4

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-83136-2_4

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-83138-6

  • Online ISBN: 978-3-642-83136-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation