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Experimental Considerations

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Laser Processing of Thin Films and Microstructures

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 3))

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Abstract

In this chapter the essential experimental criteria for laser processing are considered. Firstly, the basic properties of laser beams are briefly reviewed, including the definitions of spot size, divergence, depth of focus etc, as well as the characteristics of beam propagation. Optical resolution is also discussed, not only in terms of the properties of the laser radiation, but also particular physical and chemical mechanisms that ultimately can control spatial line widths. Then the many varied modes of laser processing that have been used over the past few years are introduced and summarised. Particular attention is given here to pattern replication methods. The practical aspects of process uniformity and repeatability, as well as beam profile engineering and measurement are also described in this chapter.

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Authors and Affiliations

  1. Department of Electronic and Electrical Engineering, University College London, Torrington Place, London, WCIE 7JE, UK

    Dr. Ian W. Boyd

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  1. Dr. Ian W. Boyd
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© 1987 Springer-Verlag Berlin Heidelberg

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Boyd, I.W. (1987). Experimental Considerations. In: Laser Processing of Thin Films and Microstructures. Springer Series in Materials Science, vol 3. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-83136-2_3

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  • DOI: https://doi.org/10.1007/978-3-642-83136-2_3

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-83138-6

  • Online ISBN: 978-3-642-83136-2

  • eBook Packages: Springer Book Archive

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