Skip to main content

Reactivity and Structure of Sputtered Species

  • Conference paper
Book cover Secondary Ion Mass Spectrometry SIMS V

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 44))

  • 290 Accesses

Abstract

A high-pressure, fast-atom bombardment (FAB) ion source has been constructed [1] to study ion/molecule reactions of sputtered ions and neutrals. Pressures in this ion source are typically on the order of 0.1 to 0.5 Torr. Studies of metal cluster ion chemistry have been performed using this chemical ionization/fast-atom bombardment (CI/FAB) source with the mass-analyzed ion kinetic energy spectrometry (MIKES) technique. Our experiments were performed using a reverse-geometry, double-focusing mass spectrometer. Xenon gas was used as the fast-atom beam.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. J.E. Campana and R.B. Freas: J. Chem. Soc. Chem. Commun. 1414 (1984)

    Google Scholar 

  2. R.B. Freas and J.E. Campana: J. Am. Chem. Soc. In press

    Google Scholar 

  3. T.P. Martin: J. Chem. Phys. 72, 3506 (1980)

    Article  ADS  Google Scholar 

  4. R.B. Freas, B.I. Dunlap, and J.E. Campana: unpublished results

    Google Scholar 

  5. R.B. Freas and D.P. Ridge: J. Am. Chem. Soc. 102, 7129 (1980)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1986 Springer-Verlag Berlin Heidelberg

About this paper

Cite this paper

Freas, R.B., Campana, J.E. (1986). Reactivity and Structure of Sputtered Species. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_10

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-82724-2_10

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82726-6

  • Online ISBN: 978-3-642-82724-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics